Spectrum-holographic formation of fine etching patterns on a silicon surface with pulse-shaped femtosecond laser pulses

Takasumi Tanabe, Tatsuyoshi Okamoto, Fumihiko Kannari

Research output: Contribution to journalArticle

Abstract

We demonstrate a novel method of material processing to create flexible periodic structures using temporal pulse shaping of ultrashort laser pulses and spectral interferometry. This scheme is based on the idea that the interferometric fringe pattern at a Fourier spectral plane can be varied by programming temporal amplitude, relative phase and the interval of two collinearly incident pulses. Various periodical patterns are formed on a silicon surface located at the Fourier plane with laser ablation.

Original languageEnglish
Pages (from-to)5594-5597
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number9 A
Publication statusPublished - 2003 Sep

Fingerprint

Pulse shaping
Periodic structures
Laser ablation
Ultrashort pulses
Interferometry
Etching
Laser pulses
etching
Silicon
silicon
Processing
pulses
lasers
programming
laser ablation
interferometry
diffraction patterns
intervals

Keywords

  • Acoustic optic phase dispersion filter (AOPDF)
  • Femtosecond laser pulses
  • Pulse shaping
  • Short pulse ablation
  • Spectral interferometry

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

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KW - Spectral interferometry

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