Spectrum-holographic formation of fine etching patterns on a silicon surface with pulse-shaped femtosecond laser pulses

Takasumi Tanabe; Tatsuyoshi Okamoto; Fumihiko Kannari

doi:10.1143/jjap.42.5594

Spectrum-holographic formation of fine etching patterns on a silicon surface with pulse-shaped femtosecond laser pulses

Takasumi Tanabe, Tatsuyoshi Okamoto, Fumihiko Kannari

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We demonstrate a novel method of material processing to create flexible periodic structures using temporal pulse shaping of ultrashort laser pulses and spectral interferometry. This scheme is based on the idea that the interferometric fringe pattern at a Fourier spectral plane can be varied by programming temporal amplitude, relative phase and the interval of two collinearly incident pulses. Various periodical patterns are formed on a silicon surface located at the Fourier plane with laser ablation.

Original language	English
Pages (from-to)	5594-5597
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	42
Issue number	9 A
DOIs	https://doi.org/10.1143/jjap.42.5594
Publication status	Published - 2003 Sept

Keywords

Acoustic optic phase dispersion filter (AOPDF)
Femtosecond laser pulses
Pulse shaping
Short pulse ablation
Spectral interferometry

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.42.5594

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Spectrum-holographic formation of fine etching patterns on a silicon surface with pulse-shaped femtosecond laser pulses. / Tanabe, Takasumi; Okamoto, Tatsuyoshi; Kannari, Fumihiko.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 42, No. 9 A, 09.2003, p. 5594-5597.

Research output: Contribution to journal › Article › peer-review

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AB - We demonstrate a novel method of material processing to create flexible periodic structures using temporal pulse shaping of ultrashort laser pulses and spectral interferometry. This scheme is based on the idea that the interferometric fringe pattern at a Fourier spectral plane can be varied by programming temporal amplitude, relative phase and the interval of two collinearly incident pulses. Various periodical patterns are formed on a silicon surface located at the Fourier plane with laser ablation.

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Spectrum-holographic formation of fine etching patterns on a silicon surface with pulse-shaped femtosecond laser pulses

Abstract

Keywords

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