Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

Sumihiro Kohyama, Hidetoshi Takahashi, Satoru Yoshida, Hiroaki Onoe, Kayoko Hirayama-Shoji, Takuya Tsukagoshi, Tomoyuki Takahata, Isao Shimoyama

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 μN and 0.1 μm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.

Original languageEnglish
Article number045013
JournalJournal of Micromechanics and Microengineering
Volume28
Issue number4
DOIs
Publication statusPublished - 2018 Feb 20

Keywords

  • MEMS
  • microparticle
  • sidewall doping
  • spring constant

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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