TY - JOUR
T1 - Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers
AU - Kohyama, Sumihiro
AU - Takahashi, Hidetoshi
AU - Yoshida, Satoru
AU - Onoe, Hiroaki
AU - Hirayama-Shoji, Kayoko
AU - Tsukagoshi, Takuya
AU - Takahata, Tomoyuki
AU - Shimoyama, Isao
N1 - Funding Information:
This study was supported by JSPS KAKENHI Grant Number 25000010. The EB photo mask fabrication was performed using the EB lithography apparatus at the VLSI Design and Education Center (VDEC) at the University of Tokyo.
Publisher Copyright:
© 2018 IOP Publishing Ltd.
PY - 2018/2/20
Y1 - 2018/2/20
N2 - This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 μN and 0.1 μm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.
AB - This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 μN and 0.1 μm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.
KW - MEMS
KW - microparticle
KW - sidewall doping
KW - spring constant
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U2 - 10.1088/1361-6439/aaabf7
DO - 10.1088/1361-6439/aaabf7
M3 - Article
AN - SCOPUS:85042547534
SN - 0960-1317
VL - 28
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 4
M1 - 045013
ER -