Fingerprint
Dive into the research topics of 'Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers
Sumihiro Kohyama, Hidetoshi Takahashi, Satoru Yoshida, Hiroaki Onoe, Kayoko Hirayama-Shoji, Takuya Tsukagoshi, Tomoyuki Takahata, Isao Shimoyama
Research output: Contribution to journal › Article › peer-review
4
Citations
(Scopus)