Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS

Shuichiro Hayashi, Yasutaka Nakajima, Mitsuhiro Terakawa

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.

    Original languageEnglish
    Title of host publicationLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
    EditorsGediminas Raciukaitis, Carlos Molpeceres, Tetsuya Makimura
    PublisherSPIE
    ISBN (Electronic)9781510624528
    DOIs
    Publication statusPublished - 2019 Jan 1
    EventLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019 - San Francisco, United States
    Duration: 2019 Feb 42019 Feb 6

    Publication series

    NameProceedings of SPIE - The International Society for Optical Engineering
    Volume10905
    ISSN (Print)0277-786X
    ISSN (Electronic)1996-756X

    Conference

    ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019
    CountryUnited States
    CitySan Francisco
    Period19/2/419/2/6

    Keywords

    • femtosecond laser
    • laser direct modification
    • polydimethylsiloxane
    • silicon carbide
    • strain sensing

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering

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