TY - GEN
T1 - Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS
AU - Hayashi, Shuichiro
AU - Nakajima, Yasutaka
AU - Terakawa, Mitsuhiro
N1 - Funding Information:
This study was supported in part by a grant from the Amada Foundation.
Publisher Copyright:
© COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
PY - 2019
Y1 - 2019
N2 - By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.
AB - By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.
KW - femtosecond laser
KW - laser direct modification
KW - polydimethylsiloxane
KW - silicon carbide
KW - strain sensing
UR - http://www.scopus.com/inward/record.url?scp=85068001321&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85068001321&partnerID=8YFLogxK
U2 - 10.1117/12.2507088
DO - 10.1117/12.2507088
M3 - Conference contribution
AN - SCOPUS:85068001321
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
A2 - Makimura, Tetsuya
A2 - Raciukaitis, Gediminas
A2 - Molpeceres, Carlos
PB - SPIE
T2 - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019
Y2 - 4 February 2019 through 6 February 2019
ER -