Abstract
By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.
| Original language | English |
|---|---|
| Title of host publication | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV |
| Editors | Gediminas Raciukaitis, Carlos Molpeceres, Tetsuya Makimura |
| Publisher | SPIE |
| ISBN (Electronic) | 9781510624528 |
| DOIs | |
| Publication status | Published - 2019 Jan 1 |
| Event | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019 - San Francisco, United States Duration: 2019 Feb 4 → 2019 Feb 6 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 10905 |
| ISSN (Print) | 0277-786X |
| ISSN (Electronic) | 1996-756X |
Conference
| Conference | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019 |
|---|---|
| Country | United States |
| City | San Francisco |
| Period | 19/2/4 → 19/2/6 |
Fingerprint
Keywords
- femtosecond laser
- laser direct modification
- polydimethylsiloxane
- silicon carbide
- strain sensing
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Cite this
Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS. / Hayashi, Shuichiro; Nakajima, Yasutaka; Terakawa, Mitsuhiro.
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV. ed. / Gediminas Raciukaitis; Carlos Molpeceres; Tetsuya Makimura. SPIE, 2019. 1090519 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10905).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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TY - GEN
T1 - Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS
AU - Hayashi, Shuichiro
AU - Nakajima, Yasutaka
AU - Terakawa, Mitsuhiro
PY - 2019/1/1
Y1 - 2019/1/1
N2 - By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.
AB - By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.
KW - femtosecond laser
KW - laser direct modification
KW - polydimethylsiloxane
KW - silicon carbide
KW - strain sensing
UR - http://www.scopus.com/inward/record.url?scp=85068001321&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85068001321&partnerID=8YFLogxK
U2 - 10.1117/12.2507088
DO - 10.1117/12.2507088
M3 - Conference contribution
AN - SCOPUS:85068001321
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
A2 - Raciukaitis, Gediminas
A2 - Molpeceres, Carlos
A2 - Makimura, Tetsuya
PB - SPIE
ER -