Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS

Shuichiro Hayashi; Yasutaka Nakajima; Mitsuhiro Terakawa

doi:10.1117/12.2507088

Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS

Shuichiro Hayashi, Yasutaka Nakajima, Mitsuhiro Terakawa

Department of Electronics and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.

Original language	English
Title of host publication	Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
Editors	Gediminas Raciukaitis, Carlos Molpeceres, Tetsuya Makimura
Publisher	SPIE
ISBN (Electronic)	9781510624528
DOIs	https://doi.org/10.1117/12.2507088
Publication status	Published - 2019 Jan 1
Event	Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019 - San Francisco, United States Duration: 2019 Feb 4 → 2019 Feb 6

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	10905
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019
Country	United States
City	San Francisco
Period	19/2/4 → 19/2/6

Fingerprint

Keywords

femtosecond laser
laser direct modification
polydimethylsiloxane
silicon carbide
strain sensing

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Cite this

Hayashi, S., Nakajima, Y., & Terakawa, M. (2019). Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS. In G. Raciukaitis, C. Molpeceres, & T. Makimura (Eds.), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV [1090519] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10905). SPIE. https://doi.org/10.1117/12.2507088

Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS. / Hayashi, Shuichiro; Nakajima, Yasutaka; Terakawa, Mitsuhiro.

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV. ed. / Gediminas Raciukaitis; Carlos Molpeceres; Tetsuya Makimura. SPIE, 2019. 1090519 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10905).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hayashi, S, Nakajima, Y & Terakawa, M 2019, Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS. in G Raciukaitis, C Molpeceres & T Makimura (eds), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV., 1090519, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10905, SPIE, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019, San Francisco, United States, 19/2/4. https://doi.org/10.1117/12.2507088

Hayashi S, Nakajima Y, Terakawa M. Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS. In Raciukaitis G, Molpeceres C, Makimura T, editors, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV. SPIE. 2019. 1090519. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2507088

Hayashi, Shuichiro ; Nakajima, Yasutaka ; Terakawa, Mitsuhiro. / Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS. Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV. editor / Gediminas Raciukaitis ; Carlos Molpeceres ; Tetsuya Makimura. SPIE, 2019. (Proceedings of SPIE - The International Society for Optical Engineering).

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Access to Document

10.1117/12.2507088