Strain sensing using electrically conductive structures fabricated by femtosecond-laser-based modification of PDMS

Shuichiro Hayashi, Yasutaka Nakajima, Mitsuhiro Terakawa

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Abstract

Strain sensing was demonstrated by utilizing electrically conductive silicon-carbide (β-SiC) fabricated by femtosecond-laser-based direct modification of polydimethylsiloxane (PDMS). Depending on the laser scanning direction used for the fabrication procedure, the fabricated structures showed different sensitivity to strain and this difference was discussed by observing the surface morphology at various bending radii using scanning electron microscopy (SEM). The change in electrical conductance at the flat state after repeated bending was also investigated. Furthermore, preliminary demonstration of human motion sensing was performed using the fabricated structures. The presented method will open doors to novel electronic device applications using PDMS.

Original languageEnglish
Pages (from-to)2672-2680
Number of pages9
JournalOptical Materials Express
Volume9
Issue number6
DOIs
Publication statusPublished - 2019 Jun 1

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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