Stress engineering in high-κ FETs for mobility and on-current enhancements

Masumi Saitoh, Shigeki Kobayashi, Ken Uchida

    Research output: Contribution to journalArticlepeer-review

    2 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Stress engineering in high-κ FETs for mobility and on-current enhancements'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Chemical Compounds