Structural change in sol-gel derived SiO2 films using ultraviolet irradiation

Hiroaki Imai; Hiroshi Hirashima; Koichi Awazu; Hideo Onuki

doi:10.1117/12.189015

Structural change in sol-gel derived SiO₂ films using ultraviolet irradiation

Hiroaki Imai, Hiroshi Hirashima, Koichi Awazu, Hideo Onuki

Department of Applied Chemistry

Research output: Contribution to journal › Conference article › peer-review

14 Citations (Scopus)

Abstract

Photo-induced changes in structure of sol-gel derived SiO₂ films were studied in order to explore a possibility of densification of sol-gel films at room temperature using energetic photons. Gel films which were produced on silicon substrates by dip-coating of sols prepared through hydrolysis of tetraethoxysilane were subjected to synchrotron radiation at room temperature. Structural changes of the gel films were investigated by ellipsometry and infrared spectroscopy. The radiation resulted in an increase in refractive index, a decrease in thickness of the films and a loss of OH groups. Increase in temperature of the films was less than 50 °C during the irradiation. The results indicate that ultraviolet lights induce densification of gel films through electronic excitation.

Original language	English
Pages (from-to)	71-76
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	2288
DOIs	https://doi.org/10.1117/12.189015
Publication status	Published - 1994 Oct 13
Event	Sol-Gel Optics III 1994 - San Diego, United States Duration: 1994 Jul 24 → 1994 Jul 29

Keywords

Photo-induced structural change
SiO
Sol-gel
Synchrotron radiation

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.189015

Cite this

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title = "Structural change in sol-gel derived SiO2 films using ultraviolet irradiation",

abstract = "Photo-induced changes in structure of sol-gel derived SiO2 films were studied in order to explore a possibility of densification of sol-gel films at room temperature using energetic photons. Gel films which were produced on silicon substrates by dip-coating of sols prepared through hydrolysis of tetraethoxysilane were subjected to synchrotron radiation at room temperature. Structural changes of the gel films were investigated by ellipsometry and infrared spectroscopy. The radiation resulted in an increase in refractive index, a decrease in thickness of the films and a loss of OH groups. Increase in temperature of the films was less than 50 °C during the irradiation. The results indicate that ultraviolet lights induce densification of gel films through electronic excitation.",

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AU - Imai, Hiroaki

AU - Hirashima, Hiroshi

AU - Awazu, Koichi

AU - Onuki, Hideo

PY - 1994/10/13

Y1 - 1994/10/13

N2 - Photo-induced changes in structure of sol-gel derived SiO2 films were studied in order to explore a possibility of densification of sol-gel films at room temperature using energetic photons. Gel films which were produced on silicon substrates by dip-coating of sols prepared through hydrolysis of tetraethoxysilane were subjected to synchrotron radiation at room temperature. Structural changes of the gel films were investigated by ellipsometry and infrared spectroscopy. The radiation resulted in an increase in refractive index, a decrease in thickness of the films and a loss of OH groups. Increase in temperature of the films was less than 50 °C during the irradiation. The results indicate that ultraviolet lights induce densification of gel films through electronic excitation.

AB - Photo-induced changes in structure of sol-gel derived SiO2 films were studied in order to explore a possibility of densification of sol-gel films at room temperature using energetic photons. Gel films which were produced on silicon substrates by dip-coating of sols prepared through hydrolysis of tetraethoxysilane were subjected to synchrotron radiation at room temperature. Structural changes of the gel films were investigated by ellipsometry and infrared spectroscopy. The radiation resulted in an increase in refractive index, a decrease in thickness of the films and a loss of OH groups. Increase in temperature of the films was less than 50 °C during the irradiation. The results indicate that ultraviolet lights induce densification of gel films through electronic excitation.

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KW - Sol-gel

KW - Synchrotron radiation

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