Structural changes of CuGaSe2 films during the three-stage process observed by spectroscopic light scattering

K. Sakurai, S. Nakamura, T. Baba, Y. Kimura, A. Yamada, S. Ishizuka, K. Matsubara, P. Fons, R. Scheer, H. Nakanishi, S. Niki

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


We have studied the three-stage deposition process of CuGaSe2 (CGS) films, with the help of spectroscopic light scattering (SLS) in situ monitoring method. During the second stage (i.e. deposition of Cu, Se), an abrupt change from a two-layered structure to a single layer, together with a significant increase in the grain size, was observed in the vicinity of the Cu/Ga=1.0 point. Shortly before this abrupt change, a characteristic peak was observed by SLS, accompanied by a definitive change in depth-oriented distribution of Cu and Na.

Original languageEnglish
Pages (from-to)367-372
Number of pages6
JournalThin Solid Films
Publication statusPublished - 2005 Jun 1
Externally publishedYes


  • CuGaSe films
  • Deposition process
  • Spectroscopic light scattering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


Dive into the research topics of 'Structural changes of CuGaSe<sub>2</sub> films during the three-stage process observed by spectroscopic light scattering'. Together they form a unique fingerprint.

Cite this