Structures of Velocity Distribution Functions and Transport Parameters of the Electron Swarm in Ch4 in a Dc Electric Field

Naohiko Shimura; Toshiaki Makabe

doi:10.1088/0022-3727/25/5/004

Structures of Velocity Distribution Functions and Transport Parameters of the Electron Swarm in Ch₄ in a Dc Electric Field

Naohiko Shimura, Toshiaki Makabe

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

The structure of each term in the density gradient expansion of the velocity distribution function of an isolated electron swarm has been investigated in a dc field by a numerical analysis using a finite element Boltzmann equation method. The electron swarm parameters, including the dissociation rate in CH₄, have been calculated over a wide range: 0.1 <E/N < 3000 Td.

Original language	English
Pages (from-to)	751-760
Number of pages	10
Journal	Journal of Physics D: Applied Physics
Volume	25
Issue number	5
DOIs	https://doi.org/10.1088/0022-3727/25/5/004
Publication status	Published - 1992 May 14
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Acoustics and Ultrasonics
Surfaces, Coatings and Films

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10.1088/0022-3727/25/5/004

Cite this

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title = "Structures of Velocity Distribution Functions and Transport Parameters of the Electron Swarm in Ch4 in a Dc Electric Field",

abstract = "The structure of each term in the density gradient expansion of the velocity distribution function of an isolated electron swarm has been investigated in a dc field by a numerical analysis using a finite element Boltzmann equation method. The electron swarm parameters, including the dissociation rate in CH4, have been calculated over a wide range: 0.1 <E/N < 3000 Td.",

author = "Naohiko Shimura and Toshiaki Makabe",

year = "1992",

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AU - Makabe, Toshiaki

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N2 - The structure of each term in the density gradient expansion of the velocity distribution function of an isolated electron swarm has been investigated in a dc field by a numerical analysis using a finite element Boltzmann equation method. The electron swarm parameters, including the dissociation rate in CH4, have been calculated over a wide range: 0.1 <E/N < 3000 Td.

AB - The structure of each term in the density gradient expansion of the velocity distribution function of an isolated electron swarm has been investigated in a dc field by a numerical analysis using a finite element Boltzmann equation method. The electron swarm parameters, including the dissociation rate in CH4, have been calculated over a wide range: 0.1 <E/N < 3000 Td.

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Structures of Velocity Distribution Functions and Transport Parameters of the Electron Swarm in Ch₄ in a Dc Electric Field

Abstract

ASJC Scopus subject areas

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