Structures of Velocity Distribution Functions and Transport Parameters of the Electron Swarm in Ch4 in a Dc Electric Field

Naohiko Shimura, Toshiaki Makabe

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

The structure of each term in the density gradient expansion of the velocity distribution function of an isolated electron swarm has been investigated in a dc field by a numerical analysis using a finite element Boltzmann equation method. The electron swarm parameters, including the dissociation rate in CH4, have been calculated over a wide range: 0.1 <E/N < 3000 Td.

Original languageEnglish
Pages (from-to)751-760
Number of pages10
JournalJournal of Physics D: Applied Physics
Volume25
Issue number5
DOIs
Publication statusPublished - 1992 May 14

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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