Study of beam divergence of a low-energy (1–3 keV) ion source

Kiyoshi Yatsu, Shinichi Aoki, Akira Horie, Syoich Miyoshi, Kanzi Ōta, Kunihiko Okano, Nobuyuki Inoue, Taijiro Uchida

Research output: Contribution to journalArticle

4 Citations (Scopus)
Original languageEnglish
Number of pages1
JournalJapanese journal of applied physics
Volume22
Issue number6R
DOIs
Publication statusPublished - 1983 Jun

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Yatsu, K., Aoki, S., Horie, A., Miyoshi, S., Ōta, K., Okano, K., Inoue, N., & Uchida, T. (1983). Study of beam divergence of a low-energy (1–3 keV) ion source. Japanese journal of applied physics, 22(6R). https://doi.org/10.1143/JJAP.22.1071