@article{7f12b62140444490baea1d0137ba83d4,
title = "Study of beam divergence of a low-energy (1–3 keV) ion source",
author = "Kiyoshi Yatsu and Shinichi Aoki and Akira Horie and Syoich Miyoshi and Kanzi Ōta and Kunihiko Okano and Nobuyuki Inoue and Taijiro Uchida",
year = "1983",
month = jun,
doi = "10.1143/JJAP.22.1071",
language = "English",
volume = "22",
pages = "1071",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "6R",
}