Study of beam divergence of a low-energy (1–3 keV) ion source

Kiyoshi Yatsu, Shinichi Aoki, Akira Horie, Syoich Miyoshi, Kanzi Ōta, Kunihiko Okano, Nobuyuki Inoue, Taijiro Uchida

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)
Original languageEnglish
Number of pages1
JournalJapanese journal of applied physics
Volume22
Issue number6R
DOIs
Publication statusPublished - 1983 Jun

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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