Study of surface charges on dielectric electrodes in a radio-frequency glow discharge

S. Kakuta, T. Kamata, T. Makabe, S. Kobayashi, K. Terai, T. Tamagawa

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A radio-frequency glow discharge between dielectric electrodes is observed by spatiotemporal optical emission spectroscopy. No emission from an excited Ar ion is observed in the dielectric electrode discharge, but it is observed in a discharge with metallic electrodes under the same external conditions. On the other hand, marked excitation of Ar(3p5) on the driven dielectric is observed. The maximum of the spatiotemporal net excitation rate profile is larger and the amplitude of the current is smaller compared with the discharge sustained by metallic electrodes. These differences are attributed to the effect of surface charge on the dielectric. The dielectric immersed in the discharge is exposed to the ion and electron fluxes, and is charged negatively to balance both fluxes. The accumulated charge on the dielectric is estimated by a capacitor in series with the grounded electrode. As a result, the surface charge affects the field just in front of the dielectric and enhances excitation and ionization.

Original languageEnglish
Pages (from-to)985-991
Number of pages7
JournalJournal of Applied Physics
Volume77
Issue number3
DOIs
Publication statusPublished - 1995

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glow discharges
radio frequencies
electrodes
excitation
electron flux
optical emission spectroscopy
capacitors
ions
ionization
profiles

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Kakuta, S., Kamata, T., Makabe, T., Kobayashi, S., Terai, K., & Tamagawa, T. (1995). Study of surface charges on dielectric electrodes in a radio-frequency glow discharge. Journal of Applied Physics, 77(3), 985-991. https://doi.org/10.1063/1.358945

Study of surface charges on dielectric electrodes in a radio-frequency glow discharge. / Kakuta, S.; Kamata, T.; Makabe, T.; Kobayashi, S.; Terai, K.; Tamagawa, T.

In: Journal of Applied Physics, Vol. 77, No. 3, 1995, p. 985-991.

Research output: Contribution to journalArticle

Kakuta, S, Kamata, T, Makabe, T, Kobayashi, S, Terai, K & Tamagawa, T 1995, 'Study of surface charges on dielectric electrodes in a radio-frequency glow discharge', Journal of Applied Physics, vol. 77, no. 3, pp. 985-991. https://doi.org/10.1063/1.358945
Kakuta, S. ; Kamata, T. ; Makabe, T. ; Kobayashi, S. ; Terai, K. ; Tamagawa, T. / Study of surface charges on dielectric electrodes in a radio-frequency glow discharge. In: Journal of Applied Physics. 1995 ; Vol. 77, No. 3. pp. 985-991.
@article{cf99d009292a49848c9120cc67710237,
title = "Study of surface charges on dielectric electrodes in a radio-frequency glow discharge",
abstract = "A radio-frequency glow discharge between dielectric electrodes is observed by spatiotemporal optical emission spectroscopy. No emission from an excited Ar ion is observed in the dielectric electrode discharge, but it is observed in a discharge with metallic electrodes under the same external conditions. On the other hand, marked excitation of Ar(3p5) on the driven dielectric is observed. The maximum of the spatiotemporal net excitation rate profile is larger and the amplitude of the current is smaller compared with the discharge sustained by metallic electrodes. These differences are attributed to the effect of surface charge on the dielectric. The dielectric immersed in the discharge is exposed to the ion and electron fluxes, and is charged negatively to balance both fluxes. The accumulated charge on the dielectric is estimated by a capacitor in series with the grounded electrode. As a result, the surface charge affects the field just in front of the dielectric and enhances excitation and ionization.",
author = "S. Kakuta and T. Kamata and T. Makabe and S. Kobayashi and K. Terai and T. Tamagawa",
year = "1995",
doi = "10.1063/1.358945",
language = "English",
volume = "77",
pages = "985--991",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "3",

}

TY - JOUR

T1 - Study of surface charges on dielectric electrodes in a radio-frequency glow discharge

AU - Kakuta, S.

AU - Kamata, T.

AU - Makabe, T.

AU - Kobayashi, S.

AU - Terai, K.

AU - Tamagawa, T.

PY - 1995

Y1 - 1995

N2 - A radio-frequency glow discharge between dielectric electrodes is observed by spatiotemporal optical emission spectroscopy. No emission from an excited Ar ion is observed in the dielectric electrode discharge, but it is observed in a discharge with metallic electrodes under the same external conditions. On the other hand, marked excitation of Ar(3p5) on the driven dielectric is observed. The maximum of the spatiotemporal net excitation rate profile is larger and the amplitude of the current is smaller compared with the discharge sustained by metallic electrodes. These differences are attributed to the effect of surface charge on the dielectric. The dielectric immersed in the discharge is exposed to the ion and electron fluxes, and is charged negatively to balance both fluxes. The accumulated charge on the dielectric is estimated by a capacitor in series with the grounded electrode. As a result, the surface charge affects the field just in front of the dielectric and enhances excitation and ionization.

AB - A radio-frequency glow discharge between dielectric electrodes is observed by spatiotemporal optical emission spectroscopy. No emission from an excited Ar ion is observed in the dielectric electrode discharge, but it is observed in a discharge with metallic electrodes under the same external conditions. On the other hand, marked excitation of Ar(3p5) on the driven dielectric is observed. The maximum of the spatiotemporal net excitation rate profile is larger and the amplitude of the current is smaller compared with the discharge sustained by metallic electrodes. These differences are attributed to the effect of surface charge on the dielectric. The dielectric immersed in the discharge is exposed to the ion and electron fluxes, and is charged negatively to balance both fluxes. The accumulated charge on the dielectric is estimated by a capacitor in series with the grounded electrode. As a result, the surface charge affects the field just in front of the dielectric and enhances excitation and ionization.

UR - http://www.scopus.com/inward/record.url?scp=0005752235&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0005752235&partnerID=8YFLogxK

U2 - 10.1063/1.358945

DO - 10.1063/1.358945

M3 - Article

VL - 77

SP - 985

EP - 991

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 3

ER -