Study of the structure in rf glow discharges in SiH4/H 2 by spatiotemporal optical emission spectroscopy: Influence of negative ions

Fumiyoshi Tochikubo, Akira Suzuki, Shigeru Kakuta, Yuko Terazono, Toshiaki Makabe

Research output: Contribution to journal › Article › peer-review

67 Citations (Scopus)

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Physics & Astronomy