Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy

Fumiyoshi Tochikubo, Toshiaki Makabe, Shigeru Kakuta, Akira Suzuki

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46 Citations (Scopus)

Abstract

Radio frequency discharges at 13.56 MHz in CH4(100%), CH 4(10%)/H2, and H2(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H α and H2(d3Πu→a 3Σg+) in H2 at 100 kHz.

Original languageEnglish
Pages (from-to)2143-2150
Number of pages8
JournalJournal of Applied Physics
Volume71
Issue number5
DOIs
Publication statusPublished - 1992 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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