Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy

Fumiyoshi Tochikubo, Toshiaki Makabe, Shigeru Kakuta, Akira Suzuki

Research output: Contribution to journalArticle

44 Citations (Scopus)

Abstract

Radio frequency discharges at 13.56 MHz in CH4(100%), CH 4(10%)/H2, and H2(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H α and H2(d3Πu→a 3Σg+) in H2 at 100 kHz.

Original languageEnglish
Pages (from-to)2143-2150
Number of pages8
JournalJournal of Applied Physics
Volume71
Issue number5
DOIs
Publication statusPublished - 1992

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optical emission spectroscopy
glow discharges
radio frequencies
methylidyne
quenching
excitation
radio frequency discharge
profiles
high energy electrons
hydrogen
electronics

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy. / Tochikubo, Fumiyoshi; Makabe, Toshiaki; Kakuta, Shigeru; Suzuki, Akira.

In: Journal of Applied Physics, Vol. 71, No. 5, 1992, p. 2143-2150.

Research output: Contribution to journalArticle

Tochikubo, Fumiyoshi ; Makabe, Toshiaki ; Kakuta, Shigeru ; Suzuki, Akira. / Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy. In: Journal of Applied Physics. 1992 ; Vol. 71, No. 5. pp. 2143-2150.
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