Study of the sustaining mechanism in an inductively coupled plasma

Kenji Kondo, Hidehiko Kuroda, Toshiaki Makabe

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Inductively coupled plasma (ICP) has recently been of special interest in material processing reactors. We have developed a theoretical model based on the relaxation continuum (RCT) model for a collision-dominated ICP. The spatiotemporal behavior of ICP is investigated at 13.56 MHz in Ar under the crossed electric and magnetic fields. Electrons in time-varying electric and magnetic fields are transported in a complicated manner due to the appearance of E×B-drift originating due to the Larmor motion. As a result, the electron energy gain and loss mechanism is controlled by the Larmor motion and the plasma is mainly sustained near the reactor wall during the phase when the external magnetic field is weakened. The spac e-time requirements for the maintenance of an ICP are investigated in terms of the net ionization rate and the electron flux.

Original languageEnglish
Pages (from-to)4254-4257
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume33
Issue number7 B
Publication statusPublished - 1994 Jul

Fingerprint

sustaining
Inductively coupled plasma
Magnetic fields
Electrons
Electric fields
reactors
magnetic fields
electron flux
electric fields
Ionization
maintenance
Fluxes
Plasmas
electron energy
continuums
Processing
ionization
requirements
collisions
electrons

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Study of the sustaining mechanism in an inductively coupled plasma. / Kondo, Kenji; Kuroda, Hidehiko; Makabe, Toshiaki.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 33, No. 7 B, 07.1994, p. 4254-4257.

Research output: Contribution to journalArticle

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