TY - JOUR
T1 - Study of very low airborne particle count in clean-unit system platform
AU - Kaiju, Hideo
AU - Kawaguchi, Nobuyoshi
AU - Ishibashi, Akira
N1 - Funding Information:
This work is partly supported by a research project of Hokkaido TLO under NEDO Support Program for Technology Development on the Basis of Academic Findings, and also by Japan Science and Technology Agency (JST) Feasibility Study Program. The authors would like to express their gratitude to Dr. Hoshiyama at Hokkaido University for making available a handy particle counter and deeply thank Shiraiwa at Sysmex Corp. for making available use of particle counter and useful discussions.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2005/8
Y1 - 2005/8
N2 - Cleanliness of a clean-unit system platform consisting of multiply connectable clean boxes with feedback loop is studied and the time dependence of particle count is clarified experimentally and theoretically in order to achieve highly clean environment. Based on this analysis, we have demonstrated airborne particle counts as low as 5 particles/ft3 for the diameter of 0.1 μm, 0.6 particles for 0.2 fan, and 0.01 particles for 0.5 μm by a reduction of particle density coming out from the in-wall in the system. The clean-unit system with feedback loop can serve as a platform for cross-disciplinary experiments and production for fields such as nanotechnologies and biotechnologies.
AB - Cleanliness of a clean-unit system platform consisting of multiply connectable clean boxes with feedback loop is studied and the time dependence of particle count is clarified experimentally and theoretically in order to achieve highly clean environment. Based on this analysis, we have demonstrated airborne particle counts as low as 5 particles/ft3 for the diameter of 0.1 μm, 0.6 particles for 0.2 fan, and 0.01 particles for 0.5 μm by a reduction of particle density coming out from the in-wall in the system. The clean-unit system with feedback loop can serve as a platform for cross-disciplinary experiments and production for fields such as nanotechnologies and biotechnologies.
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U2 - 10.1063/1.2006387
DO - 10.1063/1.2006387
M3 - Article
AN - SCOPUS:26444606380
SN - 0034-6748
VL - 76
SP - 1
EP - 3
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 8
M1 - 085111
ER -