Study of very low airborne particle count in clean-unit system platform

Hideo Kaiju, Nobuyoshi Kawaguchi, Akira Ishibashi

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Cleanliness of a clean-unit system platform consisting of multiply connectable clean boxes with feedback loop is studied and the time dependence of particle count is clarified experimentally and theoretically in order to achieve highly clean environment. Based on this analysis, we have demonstrated airborne particle counts as low as 5 particles/ft3 for the diameter of 0.1 μm, 0.6 particles for 0.2 fan, and 0.01 particles for 0.5 μm by a reduction of particle density coming out from the in-wall in the system. The clean-unit system with feedback loop can serve as a platform for cross-disciplinary experiments and production for fields such as nanotechnologies and biotechnologies.

Original languageEnglish
Article number085111
Pages (from-to)1-3
Number of pages3
JournalReview of Scientific Instruments
Volume76
Issue number8
DOIs
Publication statusPublished - 2005 Aug 1
Externally publishedYes

Fingerprint

platforms
Feedback
Biotechnology
Nanotechnology
Fans
cleanliness
biotechnology
nanotechnology
fans
Experiments
time dependence
boxes

ASJC Scopus subject areas

  • Instrumentation

Cite this

Study of very low airborne particle count in clean-unit system platform. / Kaiju, Hideo; Kawaguchi, Nobuyoshi; Ishibashi, Akira.

In: Review of Scientific Instruments, Vol. 76, No. 8, 085111, 01.08.2005, p. 1-3.

Research output: Contribution to journalArticle

Kaiju, Hideo ; Kawaguchi, Nobuyoshi ; Ishibashi, Akira. / Study of very low airborne particle count in clean-unit system platform. In: Review of Scientific Instruments. 2005 ; Vol. 76, No. 8. pp. 1-3.
@article{b951862f4d084c7596c7242ca57e7cf1,
title = "Study of very low airborne particle count in clean-unit system platform",
abstract = "Cleanliness of a clean-unit system platform consisting of multiply connectable clean boxes with feedback loop is studied and the time dependence of particle count is clarified experimentally and theoretically in order to achieve highly clean environment. Based on this analysis, we have demonstrated airborne particle counts as low as 5 particles/ft3 for the diameter of 0.1 μm, 0.6 particles for 0.2 fan, and 0.01 particles for 0.5 μm by a reduction of particle density coming out from the in-wall in the system. The clean-unit system with feedback loop can serve as a platform for cross-disciplinary experiments and production for fields such as nanotechnologies and biotechnologies.",
author = "Hideo Kaiju and Nobuyoshi Kawaguchi and Akira Ishibashi",
year = "2005",
month = "8",
day = "1",
doi = "10.1063/1.2006387",
language = "English",
volume = "76",
pages = "1--3",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "8",

}

TY - JOUR

T1 - Study of very low airborne particle count in clean-unit system platform

AU - Kaiju, Hideo

AU - Kawaguchi, Nobuyoshi

AU - Ishibashi, Akira

PY - 2005/8/1

Y1 - 2005/8/1

N2 - Cleanliness of a clean-unit system platform consisting of multiply connectable clean boxes with feedback loop is studied and the time dependence of particle count is clarified experimentally and theoretically in order to achieve highly clean environment. Based on this analysis, we have demonstrated airborne particle counts as low as 5 particles/ft3 for the diameter of 0.1 μm, 0.6 particles for 0.2 fan, and 0.01 particles for 0.5 μm by a reduction of particle density coming out from the in-wall in the system. The clean-unit system with feedback loop can serve as a platform for cross-disciplinary experiments and production for fields such as nanotechnologies and biotechnologies.

AB - Cleanliness of a clean-unit system platform consisting of multiply connectable clean boxes with feedback loop is studied and the time dependence of particle count is clarified experimentally and theoretically in order to achieve highly clean environment. Based on this analysis, we have demonstrated airborne particle counts as low as 5 particles/ft3 for the diameter of 0.1 μm, 0.6 particles for 0.2 fan, and 0.01 particles for 0.5 μm by a reduction of particle density coming out from the in-wall in the system. The clean-unit system with feedback loop can serve as a platform for cross-disciplinary experiments and production for fields such as nanotechnologies and biotechnologies.

UR - http://www.scopus.com/inward/record.url?scp=26444606380&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=26444606380&partnerID=8YFLogxK

U2 - 10.1063/1.2006387

DO - 10.1063/1.2006387

M3 - Article

AN - SCOPUS:26444606380

VL - 76

SP - 1

EP - 3

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 8

M1 - 085111

ER -