Study of very low airborne particle count in clean-unit system platform

Hideo Kaiju, Nobuyoshi Kawaguchi, Akira Ishibashi

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Cleanliness of a clean-unit system platform consisting of multiply connectable clean boxes with feedback loop is studied and the time dependence of particle count is clarified experimentally and theoretically in order to achieve highly clean environment. Based on this analysis, we have demonstrated airborne particle counts as low as 5 particles/ft3 for the diameter of 0.1 μm, 0.6 particles for 0.2 fan, and 0.01 particles for 0.5 μm by a reduction of particle density coming out from the in-wall in the system. The clean-unit system with feedback loop can serve as a platform for cross-disciplinary experiments and production for fields such as nanotechnologies and biotechnologies.

Original languageEnglish
Article number085111
Pages (from-to)1-3
Number of pages3
JournalReview of Scientific Instruments
Volume76
Issue number8
DOIs
Publication statusPublished - 2005 Aug 1
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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