Study on Al2O3/Ge interface formed by ALD directly on epitaxial Ge

Eriko Shigesawa, Ryotaro Matsuoka, Masashi Fukumoto, Ryosuke Sano, Kohei M. Itoh, Hiroshi Nohira, Kentarou Sawano

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3 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds