Study on high-speed and compact optical bio-sensor for sample size analysis

Makoto Kamata, Kan Yamada, Yoshihiro Taguchi, Yuji Nagasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.

Original languageEnglish
Title of host publication2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
PublisherIEEE Computer Society
Volume2016-September
ISBN (Electronic)9781509010356
DOIs
Publication statusPublished - 2016 Sep 13
Event21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
Duration: 2016 Jul 312016 Aug 4

Other

Other21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
CountrySingapore
CitySingapore
Period16/7/3116/8/4

Fingerprint

Sensors
Electrophoresis
Magnetron sputtering
MEMS
Lasers

Keywords

  • diffusion coefficient
  • laser-induced dielectrophoresis
  • photoconductive layer

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Kamata, M., Yamada, K., Taguchi, Y., & Nagasaka, Y. (2016). Study on high-speed and compact optical bio-sensor for sample size analysis. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings (Vol. 2016-September). [7565850] IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565850

Study on high-speed and compact optical bio-sensor for sample size analysis. / Kamata, Makoto; Yamada, Kan; Taguchi, Yoshihiro; Nagasaka, Yuji.

2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. Vol. 2016-September IEEE Computer Society, 2016. 7565850.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kamata, M, Yamada, K, Taguchi, Y & Nagasaka, Y 2016, Study on high-speed and compact optical bio-sensor for sample size analysis. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. vol. 2016-September, 7565850, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 16/7/31. https://doi.org/10.1109/OMN.2016.7565850
Kamata M, Yamada K, Taguchi Y, Nagasaka Y. Study on high-speed and compact optical bio-sensor for sample size analysis. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. Vol. 2016-September. IEEE Computer Society. 2016. 7565850 https://doi.org/10.1109/OMN.2016.7565850
Kamata, Makoto ; Yamada, Kan ; Taguchi, Yoshihiro ; Nagasaka, Yuji. / Study on high-speed and compact optical bio-sensor for sample size analysis. 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. Vol. 2016-September IEEE Computer Society, 2016.
@inproceedings{c44242851d824dbfa32b02059cc6854c,
title = "Study on high-speed and compact optical bio-sensor for sample size analysis",
abstract = "A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.",
keywords = "diffusion coefficient, laser-induced dielectrophoresis, photoconductive layer",
author = "Makoto Kamata and Kan Yamada and Yoshihiro Taguchi and Yuji Nagasaka",
year = "2016",
month = "9",
day = "13",
doi = "10.1109/OMN.2016.7565850",
language = "English",
volume = "2016-September",
booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",
publisher = "IEEE Computer Society",

}

TY - GEN

T1 - Study on high-speed and compact optical bio-sensor for sample size analysis

AU - Kamata, Makoto

AU - Yamada, Kan

AU - Taguchi, Yoshihiro

AU - Nagasaka, Yuji

PY - 2016/9/13

Y1 - 2016/9/13

N2 - A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.

AB - A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.

KW - diffusion coefficient

KW - laser-induced dielectrophoresis

KW - photoconductive layer

UR - http://www.scopus.com/inward/record.url?scp=84990195156&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84990195156&partnerID=8YFLogxK

U2 - 10.1109/OMN.2016.7565850

DO - 10.1109/OMN.2016.7565850

M3 - Conference contribution

AN - SCOPUS:84990195156

VL - 2016-September

BT - 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings

PB - IEEE Computer Society

ER -