Study on high-speed and compact optical bio-sensor for sample size analysis

Makoto Kamata, Kan Yamada, Yoshihiro Taguchi, Yuji Nagasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.

Original languageEnglish
Title of host publication2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
PublisherIEEE Computer Society
Volume2016-September
ISBN (Electronic)9781509010356
DOIs
Publication statusPublished - 2016 Sep 13
Event21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
Duration: 2016 Jul 312016 Aug 4

Other

Other21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
CountrySingapore
CitySingapore
Period16/7/3116/8/4

Keywords

  • diffusion coefficient
  • laser-induced dielectrophoresis
  • photoconductive layer

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Kamata, M., Yamada, K., Taguchi, Y., & Nagasaka, Y. (2016). Study on high-speed and compact optical bio-sensor for sample size analysis. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings (Vol. 2016-September). [7565850] IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565850