Sub-micron GMR sensors with vertically integrated hard magnet biasing applicable for high temperature operation

K. Matsuo, K. Matsuyama, Yukio Nozaki

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper demonstrates high-temperature operation of a sub-micron GMR sensor, biased with a vertically integrated hard magnet. In the present Study, fringe fields from vertically integrated CoPt pattern are used for biasing transverse to the short axis of the GMR strip. While, well-defined shape anisotropy in the narrow strip pattern is used for biasing parallel to the short axis. A sputtered Co/Cu multilayer overlaid with CoPt is structured into strip pattern with a width of down to 0.4 μm by electron beam lithography and Ar ion milling. A typical layer structure of the studied samples is [Co(2.0 nm)/Cu(2.0 nm)]/ Ta(8.0 nm)/CoPt(23 nm). The fabricated self-biased GMR strip exhibited superior linear MR response to alternative external fields ranged from 0.4 to 250 Oe at room temperature and 553 K (apparatus limit).

Original languageEnglish
Pages (from-to)2001-2003
Number of pages3
JournalIEEE Transactions on Magnetics
Volume37
Issue number4 I
DOIs
Publication statusPublished - 2001 Jul
Externally publishedYes

Fingerprint

High temperature operations
Electron beam lithography
Magnets
strip
Multilayers
Anisotropy
magnets
Ions
sensors
Sensors
Temperature
lithography
electron beams
anisotropy
room temperature
ions

Keywords

  • Giant magneto-resistance
  • Magnetic field sensor
  • Patterned magnetic thin film
  • Shape anisotropy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Sub-micron GMR sensors with vertically integrated hard magnet biasing applicable for high temperature operation. / Matsuo, K.; Matsuyama, K.; Nozaki, Yukio.

In: IEEE Transactions on Magnetics, Vol. 37, No. 4 I, 07.2001, p. 2001-2003.

Research output: Contribution to journalArticle

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