Suppression of segregation of the phosphorus ?-doping layer in germanium by incorporation of carbon

Michihiro Yamada, Kentarou Sawano, Masashi Uematsu, Yasuo Shimizu, Koji Inoue, Yasuyoshi Nagai, Kohei M Itoh

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The successful formation of abrupt phosphorus (P) ?-doping profiles in germanium (Ge) is reported. When the P ?-doping layers were grown by molecular beam epitaxy (MBE) directly on Ge wafers whose surfaces had residual carbon impurities, more than a half the phosphorus atoms were confined successfully within a few nm of the initial doping position even after the growth of Ge capping layers on the top. On the other hand, the same P layers grown on Ge buffer layers that had much less carbon showed significantly broadened P concentration profiles. Current-voltage characteristics of Au/Ti/Ge capping/P ?-doping/n-Ge structures having the abrupt P ?-doping layers with carbon assistance showed excellent ohmic behaviors when P doses were higher than 1×1014cm%2 and the capping layer thickness was as thin as 5 nm. Therefore, the insertion of carbon around the P doping layer is a useful way of realizing ultrashallow junctions in Ge.

Original languageEnglish
Article number031304
JournalJapanese Journal of Applied Physics
Volume55
Issue number3
DOIs
Publication statusPublished - 2016 Mar 1

Fingerprint

Germanium
phosphorus
Phosphorus
germanium
Doping (additives)
retarding
Carbon
carbon
Buffer layers
Current voltage characteristics
profiles
Molecular beam epitaxy
insertion
molecular beam epitaxy
buffers
wafers
Impurities
impurities
dosage
Atoms

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Suppression of segregation of the phosphorus ?-doping layer in germanium by incorporation of carbon. / Yamada, Michihiro; Sawano, Kentarou; Uematsu, Masashi; Shimizu, Yasuo; Inoue, Koji; Nagai, Yasuyoshi; Itoh, Kohei M.

In: Japanese Journal of Applied Physics, Vol. 55, No. 3, 031304, 01.03.2016.

Research output: Contribution to journalArticle

Yamada, Michihiro ; Sawano, Kentarou ; Uematsu, Masashi ; Shimizu, Yasuo ; Inoue, Koji ; Nagai, Yasuyoshi ; Itoh, Kohei M. / Suppression of segregation of the phosphorus ?-doping layer in germanium by incorporation of carbon. In: Japanese Journal of Applied Physics. 2016 ; Vol. 55, No. 3.
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