Surface Modification of Polytetrafluoroethylene with ARF Excimer Laser Irradiation

Shingo inoue, Takeo Fujii, Voshiaki Ueno, Fumihiko Kannari

    Research output: Contribution to journalArticle

    2 Citations (Scopus)


    Crystalline thin films of polytetrafluoroethylene were deposited on Si (100) wafers by F2 laser (157 nm) ablation. X-ray photoemission spectra indicated that the composition of deposited films was similar to the source material. The surface morphology of films deposited at room temperature contained numerous fibrous structures in size of 100~400 nm, but they were smoothed out at elevated wafer temperature of ~370 K. The refractive index was ~1.35 at 633 nm. Ionized fragments in the ablation plume were measured by a Faraday cup assembly, but their effect on the deposited films was not observed at the present ionization ratio.

    Original languageEnglish
    Pages (from-to)389-396
    Number of pages8
    JournalJournal of Photopolymer Science and Technology
    Issue number2
    Publication statusPublished - 1994

    ASJC Scopus subject areas

    • Polymers and Plastics
    • Organic Chemistry
    • Materials Chemistry

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