Abstract
The wurtzite-type ZnO is a polar crystal, and its ideal (0001) surface is terminated by Zn ions while the (000 1 ) surface is terminated by oxygen ions. The surface structures of ZnO single crystals were evaluated by atomic force microscopy (AFM) and coaxial impact-collision ion scattering spectroscopy (CAICISS). The ZnO crystals were etched in HNOs and HC1 solutions, or annealed in Oi gas and vacuum at 800 °C and 950 °C to obtain flat surfaces in atomic scale. When etched in solutions and annealed in vacuum, the samples had rough O-terminated surfaces. The Znterminated and O-terminated surfaces had clear step/terrace structures only when treated in O2 gas at 950 °C for 3 hours. The CAICISS spectra were successfully analyzed on the basis of the step/terrace structure with the steps of half c-axis in height.
| Original language | English |
|---|---|
| Pages (from-to) | 109-112 |
| Number of pages | 4 |
| Journal | Key Engineering Materials |
| Volume | 169-170 |
| Publication status | Published - 1999 |
| Externally published | Yes |
Keywords
- Atomic force microscopy
- Coaxial impact-collision ion scattering spectroscopy
- Polar crystal
- Surface structure
- Zinc oxide
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering