Synthesis of a closely packed carbon nanotube forest by a multi-step growth method using plasma-based chemical vapor deposition

Yuichi Yamazaki, Masayuki Katagiri, Naoshi Sakuma, Mariko Suzuki, Shintaro Sato, Mizuhisa Nihei, Makoto Wada, Noriaki Matsunaga, Tadashi Sakai, Yuji Awano

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    60 Citations (Scopus)

    Abstract

    We report a synthesis of a closely packed multi-walled carbon nanotube (MWCNT) forest by a multi-step growth method, including a new approach to immobilize catalytic nanoparticles, using plasma-based chemical vapor deposition. The CNT packing density reaches one-half of the theoretical value, where the space of 30-40% is filled with MWCNTs. This value is approximately one order of magnitude larger than that of asgrown CNT forest synthesized using conventional methods. The method is applicable even at a spatially restricted region, for example, in trench or via hole, and is available at the growth temperature as low as 450°C.

    Original languageEnglish
    Article number055002
    JournalApplied Physics Express
    Volume3
    Issue number5
    DOIs
    Publication statusPublished - 2010 May 1

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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  • Cite this

    Yamazaki, Y., Katagiri, M., Sakuma, N., Suzuki, M., Sato, S., Nihei, M., Wada, M., Matsunaga, N., Sakai, T., & Awano, Y. (2010). Synthesis of a closely packed carbon nanotube forest by a multi-step growth method using plasma-based chemical vapor deposition. Applied Physics Express, 3(5), [055002]. https://doi.org/10.1143/APEX.3.055002