Synthesis of diamond-like carbon films on planar and non-planar geometries by the atmospheric pressure plasma chemical vapor deposition method

Mayui Noborisaka, Tomoaki Hirako, Akira Shirakura, Toshiyuki Watanabe, Masashi Morikawa, Masaki Seki, Tetsuya Suzuki

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy