Synthesis of diamond-like hydrocarbon films by atmospheric pressure filamentary dielectric barrier discharge

Tetsuya Suzuki, A. Shirakura

Research output: Contribution to journalConference article

Abstract

Diamond-like hydrocarbon (DLHC, a-C:H) films were synthesized under atmospheric pressure filamentary by dielectric discharge (FDBD) to improve their mechanical properties compared to the films synthesized by glow dielectric barrier discharge (GDBD). GDBD is generally used for atmospheric pressure-plasma-enhanced chemical vapour deposition. The discharge form transitioned from GDBD to FDBD by increasing the gap between electrodes from 1 to 4 mm. The hardness of the films increased from 3.7 to 11.9 GPa by using FDBD. The results indicate that hard DLHC films can be synthesized at room temperature and on a large area under atmospheric pressure using FDBD.

Original languageEnglish
Article number012046
JournalIOP Conference Series: Materials Science and Engineering
Volume369
Issue number1
DOIs
Publication statusPublished - 2018 Jun 12
Event2018 5th Global Conference on Polymer and Composite Materials, PCM 2018 - Kitakyushu City, Japan
Duration: 2018 Apr 102018 Apr 13

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Diamond
Hydrocarbons
Atmospheric pressure
Diamonds
Plasma enhanced chemical vapor deposition
Hardness
Mechanical properties
Electrodes
Temperature

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

Cite this

Synthesis of diamond-like hydrocarbon films by atmospheric pressure filamentary dielectric barrier discharge. / Suzuki, Tetsuya; Shirakura, A.

In: IOP Conference Series: Materials Science and Engineering, Vol. 369, No. 1, 012046, 12.06.2018.

Research output: Contribution to journalConference article

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