Synthesis of transparent and hard SiOC(-H) thin films on polycarbonate substrates by PECVD method

Mayui Noborisaka, Hideyuki Kodama, So Nagashima, Akira Shirakura, Takahiro Horiuchi, Tetsuya Suzuki

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

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