System identification of anti-vibration units in semiconductor exposure apparatus

H. Kato; S. Wakui; T. Mayama; A. Toukairin; H. Takanashi; S. Adachi

System identification of anti-vibration units in semiconductor exposure apparatus

H. Kato, S. Wakui, T. Mayama, A. Toukairin, H. Takanashi, S. Adachi

Research output: Contribution to conference › Paper › peer-review

Abstract

In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.

Original language	English
Pages	1312-1317
Number of pages	6
Publication status	Published - 1999 Dec 1
Externally published	Yes
Event	Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD) - Kohala Coast, HI, USA Duration: 1999 Aug 22 → 1999 Aug 27

Other

Other	Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD)
City	Kohala Coast, HI, USA
Period	99/8/22 → 99/8/27

ASJC Scopus subject areas

Control and Systems Engineering

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Cite this

Kato, H., Wakui, S., Mayama, T., Toukairin, A., Takanashi, H., & Adachi, S. (1999). System identification of anti-vibration units in semiconductor exposure apparatus. 1312-1317. Paper presented at Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD), Kohala Coast, HI, USA, .

System identification of anti-vibration units in semiconductor exposure apparatus. / Kato, H.; Wakui, S.; Mayama, T.; Toukairin, A.; Takanashi, H.; Adachi, S.

1999. 1312-1317 Paper presented at Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD), Kohala Coast, HI, USA, .

Research output: Contribution to conference › Paper › peer-review

Kato, H, Wakui, S, Mayama, T, Toukairin, A, Takanashi, H & Adachi, S 1999, 'System identification of anti-vibration units in semiconductor exposure apparatus', Paper presented at Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD), Kohala Coast, HI, USA, 99/8/22 - 99/8/27 pp. 1312-1317.

Kato, H. ; Wakui, S. ; Mayama, T. ; Toukairin, A. ; Takanashi, H. ; Adachi, S. / System identification of anti-vibration units in semiconductor exposure apparatus. Paper presented at Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD), Kohala Coast, HI, USA, .6 p.

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abstract = "In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.",

author = "H. Kato and S. Wakui and T. Mayama and A. Toukairin and H. Takanashi and S. Adachi",

year = "1999",

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AU - Adachi, S.

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AB - In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.

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