Abstract
In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.
| Original language | English |
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| Pages | 1312-1317 |
| Number of pages | 6 |
| Publication status | Published - 1999 Dec 1 |
| Event | Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD) - Kohala Coast, HI, USA Duration: 1999 Aug 22 → 1999 Aug 27 |
Other
| Other | Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD) |
|---|---|
| City | Kohala Coast, HI, USA |
| Period | 99/8/22 → 99/8/27 |
ASJC Scopus subject areas
- Control and Systems Engineering
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Cite this
Kato, H., Wakui, S., Mayama, T., Toukairin, A., Takanashi, H., & Adachi, S. (1999). System identification of anti-vibration units in semiconductor exposure apparatus. 1312-1317. Paper presented at Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD), Kohala Coast, HI, USA, .