Abstract
In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.
| Original language | English |
|---|---|
| Title of host publication | IEEE Conference on Control Applications - Proceedings |
| Publisher | IEEE |
| Pages | 1312-1317 |
| Number of pages | 6 |
| Volume | 2 |
| Publication status | Published - 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD) - Kohala Coast, HI, USA Duration: 1999 Aug 22 → 1999 Aug 27 |
Other
| Other | Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD) |
|---|---|
| City | Kohala Coast, HI, USA |
| Period | 99/8/22 → 99/8/27 |
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ASJC Scopus subject areas
- Control and Systems Engineering
Cite this
System identification of anti-vibration units in semiconductor exposure apparatus. / Kato, H.; Wakui, S.; Mayama, T.; Toukairin, A.; Takanashi, H.; Adachi, Shuichi.
IEEE Conference on Control Applications - Proceedings. Vol. 2 IEEE, 1999. p. 1312-1317.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - System identification of anti-vibration units in semiconductor exposure apparatus
AU - Kato, H.
AU - Wakui, S.
AU - Mayama, T.
AU - Toukairin, A.
AU - Takanashi, H.
AU - Adachi, Shuichi
PY - 1999
Y1 - 1999
N2 - In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.
AB - In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.
UR - http://www.scopus.com/inward/record.url?scp=0033309598&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0033309598&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0033309598
VL - 2
SP - 1312
EP - 1317
BT - IEEE Conference on Control Applications - Proceedings
PB - IEEE
ER -