System identification of anti-vibration units in semiconductor exposure apparatus

H. Kato, S. Wakui, T. Mayama, A. Toukairin, H. Takanashi, S. Adachi

Research output: Contribution to conferencePaperpeer-review

4 Citations (Scopus)

Abstract

In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.

Original languageEnglish
Pages1312-1317
Number of pages6
Publication statusPublished - 1999 Dec 1
Externally publishedYes
EventProceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD) - Kohala Coast, HI, USA
Duration: 1999 Aug 221999 Aug 27

Other

OtherProceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD)
CityKohala Coast, HI, USA
Period99/8/2299/8/27

ASJC Scopus subject areas

  • Control and Systems Engineering

Fingerprint Dive into the research topics of 'System identification of anti-vibration units in semiconductor exposure apparatus'. Together they form a unique fingerprint.

Cite this