System identification of anti-vibration units in semiconductor exposure apparatus

H. Kato, S. Wakui, T. Mayama, A. Toukairin, H. Takanashi, Shuichi Adachi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.

Original languageEnglish
Title of host publicationIEEE Conference on Control Applications - Proceedings
PublisherIEEE
Pages1312-1317
Number of pages6
Volume2
Publication statusPublished - 1999
Externally publishedYes
EventProceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD) - Kohala Coast, HI, USA
Duration: 1999 Aug 221999 Aug 27

Other

OtherProceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD)
CityKohala Coast, HI, USA
Period99/8/2299/8/27

Fingerprint

Identification (control systems)
Semiconductor materials
Degrees of freedom (mechanics)
Frequency response
Controllers

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Kato, H., Wakui, S., Mayama, T., Toukairin, A., Takanashi, H., & Adachi, S. (1999). System identification of anti-vibration units in semiconductor exposure apparatus. In IEEE Conference on Control Applications - Proceedings (Vol. 2, pp. 1312-1317). IEEE.

System identification of anti-vibration units in semiconductor exposure apparatus. / Kato, H.; Wakui, S.; Mayama, T.; Toukairin, A.; Takanashi, H.; Adachi, Shuichi.

IEEE Conference on Control Applications - Proceedings. Vol. 2 IEEE, 1999. p. 1312-1317.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kato, H, Wakui, S, Mayama, T, Toukairin, A, Takanashi, H & Adachi, S 1999, System identification of anti-vibration units in semiconductor exposure apparatus. in IEEE Conference on Control Applications - Proceedings. vol. 2, IEEE, pp. 1312-1317, Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD), Kohala Coast, HI, USA, 99/8/22.
Kato H, Wakui S, Mayama T, Toukairin A, Takanashi H, Adachi S. System identification of anti-vibration units in semiconductor exposure apparatus. In IEEE Conference on Control Applications - Proceedings. Vol. 2. IEEE. 1999. p. 1312-1317
Kato, H. ; Wakui, S. ; Mayama, T. ; Toukairin, A. ; Takanashi, H. ; Adachi, Shuichi. / System identification of anti-vibration units in semiconductor exposure apparatus. IEEE Conference on Control Applications - Proceedings. Vol. 2 IEEE, 1999. pp. 1312-1317
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