Temporal characteristics of net excitation rates in inductively coupled plasma in Ar and CF4 by one-dimensional relaxation continuum modeling

Kou Hou, Shinji Nakagarni, Toshiaki Makabe

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Temporal characteristics of net excitation rates in inductively coupled plasma in Ar and CF4 by one-dimensional relaxation continuum modeling'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds