The effect of laser-induced photodetachment in O2 rf discharges

Mari Shibata, Nobuhiko Nakano, Toshiaki Makabe

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Using the relaxation continuum (RCT) model, numerical analysis of oxygen rf glow discharges between parallel plates with laser irradiation parallel to the electrode was performed. The oxygen discharge sustained by a sinusoidal wave voltage at a frequency of 13.56 MHz, amplitude of 200-230 V and pressure of 0.5-1.0 Torr is irradiated by the laser with a power of 300 W, width of 2 mm and wavelength of 0.53 μm. Under these conditions, laser-induced photodetachment occurs with a large enough rate to affect the discharge structure significantly. When the plasma is irradiated continuously, the number density of ions in the incident region decreases by about 30%. The electron number density and the flux in the discharge when the pulsed laser is turned on and off every ten rf cycles, show prominent temporal variation with the variation of the electric field. Electron cooling is enhanced during the laser irradiation.

Original languageEnglish
Pages (from-to)1219-1224
Number of pages6
JournalJournal of Physics D: Applied Physics
Volume30
Issue number8
DOIs
Publication statusPublished - 1997 Apr 21

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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