The effects of deposition temperature and post-annealing on the crystal structure and mechanical property of TiCrAlN films with high Al contents

Engineering & Materials Science

• Crystal structure 100%
• Annealing 77%
• Mechanical properties 50%
• Phase transitions 40%
• Temperature 31%
• Lattice constants 14%
• Plating 10%
• Thermodynamic stability 10%
• Microhardness 9%
• Ions 8%
• Microstructure 6%

Physics & Astronomy

• crystal structure 61%
• mechanical properties 52%
• annealing 46%
• temperature 23%
• ion plating 12%
• microhardness 9%
• lattice parameters 8%
• thermal stability 8%
• arcs 8%
• grain size 7%
• microstructure 5%

Chemical Compounds

• Crystal Structure 38%
• Liquid Film 37%
• Cubic Space Group 32%
• Hexagonal Space Group 15%
• Microhardness 10%
• Lattice Parameter 9%
• Grain Size 9%
• Mixture 8%
• Annealing 7%
• Microstructure 6%
• Thermal Stability 6%
• Ion 3%