The time behaviour of electron transport in RF fields in gases

Toshiaki Makabe, Naohiko Goto

Research output: Contribution to journalArticle

40 Citations (Scopus)

Abstract

A theoretical study of the time behaviour of the electron transport in an RF field, E exp(i omega t), has been executed for the electron nonconservative case in molecular gases from the Boltzmann equation. The velocity distribution is expanded by Legendre polynomials in velocity space and Fourier series in time. In this study, the collisional relaxation times for electron energy and momentum are introduced in order to understand the time-modulation of the distribution. The authors have investigated the influence of the reduced angular frequency of the field, ω /N, both on the energy distribution and on the swarm parameters over a wide range 2.827 × 10-12���� ω/N���� 2.827 × 10-7 cm3 s-1 in CH4. The appearance of the spike-like component in the RF energy distribution is pointed out at low energy less than the vibrational threshold. It is noted that the remarkable characteristic is proper for a Ramsauer molecular gas, which has a large vibrational cross section comparable to the elastic momentum transfer cross section at low energy. It is also emphasised that a maximum in a swarm parameter, such as the ionisation rate, appears by changing omega /N at a constant value of the effective reduced field strength (E/square root 2)/N.

Original languageEnglish
Pages (from-to)887-895
Number of pages9
JournalJournal of Physics D: Applied Physics
Volume21
Issue number6
DOIs
Publication statusPublished - 1988 Jun 14

Fingerprint

Gases
molecular gases
Momentum transfer
Electrons
Boltzmann equation
Fourier series
energy distribution
Velocity distribution
gases
Relaxation time
Ionization
Momentum
electrons
Legendre functions
cross sections
Modulation
Polynomials
spikes
momentum transfer
field strength

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films
  • Electronic, Optical and Magnetic Materials

Cite this

The time behaviour of electron transport in RF fields in gases. / Makabe, Toshiaki; Goto, Naohiko.

In: Journal of Physics D: Applied Physics, Vol. 21, No. 6, 14.06.1988, p. 887-895.

Research output: Contribution to journalArticle

Makabe, Toshiaki ; Goto, Naohiko. / The time behaviour of electron transport in RF fields in gases. In: Journal of Physics D: Applied Physics. 1988 ; Vol. 21, No. 6. pp. 887-895.
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