The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma

T. Kitajima, M. Izawa, N. Nakano, T. Makabe

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

The temporal characteristics of 2D spatial images of the net excitation rate of argon 3p5 in a low-pressure capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by computer-assisted optical emission tomography for pressures ranging from 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism of the CCP are discussed on the basis of the absolute net excitation rate of Ar(3p5) in Ar for 13.56 MHz.

Original languageEnglish
Pages (from-to)1783-1789
Number of pages7
JournalJournal of Physics D: Applied Physics
Volume30
Issue number12
DOIs
Publication statusPublished - 1997 Jun 21

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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