The temporal characteristics of 2D spatial images of the net excitation rate of argon 3p5 in a low-pressure capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by computer-assisted optical emission tomography for pressures ranging from 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism of the CCP are discussed on the basis of the absolute net excitation rate of Ar(3p5) in Ar for 13.56 MHz.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films