Theoretical Analysis of Electron-Beam-Excited KrF Laser Performance: New F2 Concentration Optimization

Fumihiko Kannari, Akira Suda, Shigeru Yamaguchi, Minoru Obara, Tomoo Fujioka

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)


For an electron-beam-excited KrF laser, we analyzed theoretically the dependence of the performance characteristics on the excitation rate and initial F2 concentration. According to the analysis of KrF* formation processes, KrF* relaxation processes, 248 nm absorption processes, and their individual efficiencies, a novel optimization method for initial F2 concentrations is necessary instead of a conventional method of a “constant” F2 burn-up rate. Then, we determined optimum F2 concentration as a function of the excitation rate for excitation pulses of 20–500 ns FWHM. Finally, we obtained the scaling law for the intrinsic KrF laser efficiency.

Original languageEnglish
Pages (from-to)232-242
Number of pages11
JournalIEEE Journal of Quantum Electronics
Issue number2
Publication statusPublished - 1983 Feb

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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