Theoretical Analysis of Electron-Beam-Excited KrF Laser Performance: New F2 Concentration Optimization

Fumihiko Kannari, Akira Suda, Shigeru Yamaguchi, Minoru Obara, Tomoo Fujioka

    Research output: Contribution to journalArticle

    21 Citations (Scopus)


    For an electron-beam-excited KrF laser, we analyzed theoretically the dependence of the performance characteristics on the excitation rate and initial F2 concentration. According to the analysis of KrF* formation processes, KrF* relaxation processes, 248 nm absorption processes, and their individual efficiencies, a novel optimization method for initial F2 concentrations is necessary instead of a conventional method of a “constant” F2 burn-up rate. Then, we determined optimum F2 concentration as a function of the excitation rate for excitation pulses of 20–500 ns FWHM. Finally, we obtained the scaling law for the intrinsic KrF laser efficiency.

    Original languageEnglish
    Pages (from-to)232-242
    Number of pages11
    JournalIEEE Journal of Quantum Electronics
    Issue number2
    Publication statusPublished - 1983 Feb


    ASJC Scopus subject areas

    • Atomic and Molecular Physics, and Optics
    • Condensed Matter Physics
    • Electrical and Electronic Engineering

    Cite this