THEORETICAL ANALYSIS OF ELECTRON-BEAM-EXCITED KrF LASER PERFORMANCE: NEW F//2 CONCENTRATION OPTIMIZATION.

Fumihiko Kannari, Akira Suda, Shigeru Yamaguchi, Minoru Obara, Tomoo Fujioka

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

For an electron-beam-excited KrF laser, the authors analyzed theoretically the dependence of the performance characteristics on the excitation rate and initial F//2 concentration. According to the analysis of KrF* formation processes, KrF* relaxation processes, 248 nm absorption processes, and their individual efficiencies, a novel optimization method for initial F//2 concentrations is necessary instead of a conventional method of a ″constant″ F//2 burn-up rate. A determination was also made of the optimum F//2 concentration as a function of the excitation rate for excitation pulses of 20-500 ns FWHM. Finally, the authors obtained the scaling law for the intrinsic KrF laser efficiency.

Original languageEnglish
Pages (from-to)232-242
Number of pages11
JournalIEEE Journal of Quantum Electronics
VolumeQE-19
Issue number2
Publication statusPublished - 1983 Feb

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Electron beams
electron beams
optimization
Lasers
Scaling laws
Relaxation processes
Full width at half maximum
excitation
lasers
scaling laws
pulses

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

THEORETICAL ANALYSIS OF ELECTRON-BEAM-EXCITED KrF LASER PERFORMANCE : NEW F//2 CONCENTRATION OPTIMIZATION. / Kannari, Fumihiko; Suda, Akira; Yamaguchi, Shigeru; Obara, Minoru; Fujioka, Tomoo.

In: IEEE Journal of Quantum Electronics, Vol. QE-19, No. 2, 02.1983, p. 232-242.

Research output: Contribution to journalArticle

Kannari, Fumihiko ; Suda, Akira ; Yamaguchi, Shigeru ; Obara, Minoru ; Fujioka, Tomoo. / THEORETICAL ANALYSIS OF ELECTRON-BEAM-EXCITED KrF LASER PERFORMANCE : NEW F//2 CONCENTRATION OPTIMIZATION. In: IEEE Journal of Quantum Electronics. 1983 ; Vol. QE-19, No. 2. pp. 232-242.
@article{5f870155f20d4aa8b2bf6e0d10a0366c,
title = "THEORETICAL ANALYSIS OF ELECTRON-BEAM-EXCITED KrF LASER PERFORMANCE: NEW F//2 CONCENTRATION OPTIMIZATION.",
abstract = "For an electron-beam-excited KrF laser, the authors analyzed theoretically the dependence of the performance characteristics on the excitation rate and initial F//2 concentration. According to the analysis of KrF* formation processes, KrF* relaxation processes, 248 nm absorption processes, and their individual efficiencies, a novel optimization method for initial F//2 concentrations is necessary instead of a conventional method of a ″constant″ F//2 burn-up rate. A determination was also made of the optimum F//2 concentration as a function of the excitation rate for excitation pulses of 20-500 ns FWHM. Finally, the authors obtained the scaling law for the intrinsic KrF laser efficiency.",
author = "Fumihiko Kannari and Akira Suda and Shigeru Yamaguchi and Minoru Obara and Tomoo Fujioka",
year = "1983",
month = "2",
language = "English",
volume = "QE-19",
pages = "232--242",
journal = "IEEE Journal of Quantum Electronics",
issn = "0018-9197",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2",

}

TY - JOUR

T1 - THEORETICAL ANALYSIS OF ELECTRON-BEAM-EXCITED KrF LASER PERFORMANCE

T2 - NEW F//2 CONCENTRATION OPTIMIZATION.

AU - Kannari, Fumihiko

AU - Suda, Akira

AU - Yamaguchi, Shigeru

AU - Obara, Minoru

AU - Fujioka, Tomoo

PY - 1983/2

Y1 - 1983/2

N2 - For an electron-beam-excited KrF laser, the authors analyzed theoretically the dependence of the performance characteristics on the excitation rate and initial F//2 concentration. According to the analysis of KrF* formation processes, KrF* relaxation processes, 248 nm absorption processes, and their individual efficiencies, a novel optimization method for initial F//2 concentrations is necessary instead of a conventional method of a ″constant″ F//2 burn-up rate. A determination was also made of the optimum F//2 concentration as a function of the excitation rate for excitation pulses of 20-500 ns FWHM. Finally, the authors obtained the scaling law for the intrinsic KrF laser efficiency.

AB - For an electron-beam-excited KrF laser, the authors analyzed theoretically the dependence of the performance characteristics on the excitation rate and initial F//2 concentration. According to the analysis of KrF* formation processes, KrF* relaxation processes, 248 nm absorption processes, and their individual efficiencies, a novel optimization method for initial F//2 concentrations is necessary instead of a conventional method of a ″constant″ F//2 burn-up rate. A determination was also made of the optimum F//2 concentration as a function of the excitation rate for excitation pulses of 20-500 ns FWHM. Finally, the authors obtained the scaling law for the intrinsic KrF laser efficiency.

UR - http://www.scopus.com/inward/record.url?scp=0020706068&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020706068&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0020706068

VL - QE-19

SP - 232

EP - 242

JO - IEEE Journal of Quantum Electronics

JF - IEEE Journal of Quantum Electronics

SN - 0018-9197

IS - 2

ER -