Thermal diffusivity measurement of high-conductivity materials by means of dynamic grating radiometry. (Mmeasurement theory for thin film and development of an experimental apparatus)

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Abstract

Accurate and simple measurement method for the thermal diffusivity of high-conductivity thin film is required for the design of very densely packed integrated circuits such as ULSI. In order to measure the thermal diffusivity of high-conductivity thin film such as graphite and diamond, a new apparatus based on a dynamic grating radiometry (DGR) has been developed. In DGR method, a sample surface is heated by interference of two pulsed laser beams, and the decay of temperature at a spot on the thermal grating is monitored by an infrared detector. In the ideal case where the grating period is much smaller than the light absorption length, the thermal diffusivity parallel to the surface can be determined from the decay constant and the grating period. To consider the two dimensional problem, the anisotropy of the thin film is detected by DGR. In this paper, the theory which can calculate the thermal diffusivity perpendicular to the plane is presented. The validity of DGR is discussed through the preliminary measurement for Zr foil and Graphite Sheet.

Original languageEnglish
Pages (from-to)194-200
Number of pages7
JournalNippon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B
Volume68
Issue number665
Publication statusPublished - 2002 Jan

Fingerprint

Radiometry
Thermal diffusivity
thermal diffusivity
gratings
Thin films
conductivity
thin films
Graphite
Infrared detectors
Pulsed lasers
Light absorption
Metal foil
Laser beams
Integrated circuits
graphite
Diamonds
Anisotropy
infrared detectors
decay
electromagnetic absorption

Keywords

  • Anisotropy
  • Dynamic grating radiometry
  • High-conductivity materials
  • Optical measurement
  • Thermal diffusivity
  • Thermophysical properties
  • Thin film

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

@article{2b24f0fd478c4af0981ff647825c841e,
title = "Thermal diffusivity measurement of high-conductivity materials by means of dynamic grating radiometry. (Mmeasurement theory for thin film and development of an experimental apparatus)",
abstract = "Accurate and simple measurement method for the thermal diffusivity of high-conductivity thin film is required for the design of very densely packed integrated circuits such as ULSI. In order to measure the thermal diffusivity of high-conductivity thin film such as graphite and diamond, a new apparatus based on a dynamic grating radiometry (DGR) has been developed. In DGR method, a sample surface is heated by interference of two pulsed laser beams, and the decay of temperature at a spot on the thermal grating is monitored by an infrared detector. In the ideal case where the grating period is much smaller than the light absorption length, the thermal diffusivity parallel to the surface can be determined from the decay constant and the grating period. To consider the two dimensional problem, the anisotropy of the thin film is detected by DGR. In this paper, the theory which can calculate the thermal diffusivity perpendicular to the plane is presented. The validity of DGR is discussed through the preliminary measurement for Zr foil and Graphite Sheet.",
keywords = "Anisotropy, Dynamic grating radiometry, High-conductivity materials, Optical measurement, Thermal diffusivity, Thermophysical properties, Thin film",
author = "Yoshihiro Taguchi and Yuji Nagasaka",
year = "2002",
month = "1",
language = "English",
volume = "68",
pages = "194--200",
journal = "Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B",
issn = "0387-5016",
publisher = "Japan Society of Mechanical Engineers",
number = "665",

}

TY - JOUR

T1 - Thermal diffusivity measurement of high-conductivity materials by means of dynamic grating radiometry. (Mmeasurement theory for thin film and development of an experimental apparatus)

AU - Taguchi, Yoshihiro

AU - Nagasaka, Yuji

PY - 2002/1

Y1 - 2002/1

N2 - Accurate and simple measurement method for the thermal diffusivity of high-conductivity thin film is required for the design of very densely packed integrated circuits such as ULSI. In order to measure the thermal diffusivity of high-conductivity thin film such as graphite and diamond, a new apparatus based on a dynamic grating radiometry (DGR) has been developed. In DGR method, a sample surface is heated by interference of two pulsed laser beams, and the decay of temperature at a spot on the thermal grating is monitored by an infrared detector. In the ideal case where the grating period is much smaller than the light absorption length, the thermal diffusivity parallel to the surface can be determined from the decay constant and the grating period. To consider the two dimensional problem, the anisotropy of the thin film is detected by DGR. In this paper, the theory which can calculate the thermal diffusivity perpendicular to the plane is presented. The validity of DGR is discussed through the preliminary measurement for Zr foil and Graphite Sheet.

AB - Accurate and simple measurement method for the thermal diffusivity of high-conductivity thin film is required for the design of very densely packed integrated circuits such as ULSI. In order to measure the thermal diffusivity of high-conductivity thin film such as graphite and diamond, a new apparatus based on a dynamic grating radiometry (DGR) has been developed. In DGR method, a sample surface is heated by interference of two pulsed laser beams, and the decay of temperature at a spot on the thermal grating is monitored by an infrared detector. In the ideal case where the grating period is much smaller than the light absorption length, the thermal diffusivity parallel to the surface can be determined from the decay constant and the grating period. To consider the two dimensional problem, the anisotropy of the thin film is detected by DGR. In this paper, the theory which can calculate the thermal diffusivity perpendicular to the plane is presented. The validity of DGR is discussed through the preliminary measurement for Zr foil and Graphite Sheet.

KW - Anisotropy

KW - Dynamic grating radiometry

KW - High-conductivity materials

KW - Optical measurement

KW - Thermal diffusivity

KW - Thermophysical properties

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=0036460823&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036460823&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0036460823

VL - 68

SP - 194

EP - 200

JO - Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B

JF - Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B

SN - 0387-5016

IS - 665

ER -