Thermal diffusivity measurement of high-conductivity materials by means of dynamic grating radiometry. (Mmeasurement theory for thin film and development of an experimental apparatus)

Yoshihiro Taguchi, Yuji Nagasaka

Research output: Contribution to journalArticle

Abstract

Accurate and simple measurement method for the thermal diffusivity of high-conductivity thin film is required for the design of very densely packed integrated circuits such as ULSI. In order to measure the thermal diffusivity of high-conductivity thin film such as graphite and diamond, a new apparatus based on a dynamic grating radiometry (DGR) has been developed. In DGR method, a sample surface is heated by interference of two pulsed laser beams, and the decay of temperature at a spot on the thermal grating is monitored by an infrared detector. In the ideal case where the grating period is much smaller than the light absorption length, the thermal diffusivity parallel to the surface can be determined from the decay constant and the grating period. To consider the two dimensional problem, the anisotropy of the thin film is detected by DGR. In this paper, the theory which can calculate the thermal diffusivity perpendicular to the plane is presented. The validity of DGR is discussed through the preliminary measurement for Zr foil and Graphite Sheet.

Original languageEnglish
Pages (from-to)194-200
Number of pages7
JournalNippon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B
Volume68
Issue number665
DOIs
Publication statusPublished - 2002 Jan

Keywords

  • Anisotropy
  • Dynamic grating radiometry
  • High-conductivity materials
  • Optical measurement
  • Thermal diffusivity
  • Thermophysical properties
  • Thin film

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanical Engineering

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