Thermal diffusivity measurement of isotopically enriched 28-Si single crystal by dynamic grating radiometry

Research output: Contribution to journalArticle

Abstract

In the past decade it has been suggested that the isotopic enrichment of 28-silicon enhances its thermal properties. Thus, 28-silicon is suitable as a heat sink in large-scale integrated circuits. Although some studies have focused on the measurement of isotopically enriched silicon's thermal properties, accurate experimental data are not sufficient because of this material's high conductivity and large heat capacity which make measurement difficult. However, the dynamic grating radiometry (DGR) method has been successfully developed to measure the thermal diffusivity of 28-silicon. In the DGR method, the sample is heated by interference of two pulsed laser beams, and the temperature decay is monitored by an infrared detector. By analyzing the temperature changes of the peaks and valleys of the thermal grating, the thermal diffusivities parallel and perpendicular to the sample surface are obtained simultaneously. In this paper, the optimum conditions of the experimental setup for measuring isotopically enriched silicon are discussed. The comparison of thermal diffusivities between 28-silicon and natural silicon (with a thickness of about 100 μm) is presented, and the applicability of DGR to isotope engineering is reported.

Original languageEnglish
Pages (from-to)459-472
Number of pages14
JournalInternational Journal of Thermophysics
Volume25
Issue number2
DOIs
Publication statusPublished - 2004 Mar

Fingerprint

Radiometry
Thermal diffusivity
Silicon
thermal diffusivity
Single crystals
gratings
single crystals
silicon
Thermodynamic properties
thermodynamic properties
isotopic enrichment
Infrared detectors
heat sinks
infrared detectors
Heat sinks
Pulsed lasers
Isotopes
Specific heat
Laser beams
integrated circuits

Keywords

  • Dynamic grating radiometry
  • High-conductivity thin film
  • Isotope engineering
  • Isotopically enriched 28-silicon
  • Thermal diffusivity

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Mechanics of Materials
  • Computational Mechanics
  • Fluid Flow and Transfer Processes
  • Physics and Astronomy (miscellaneous)

Cite this

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title = "Thermal diffusivity measurement of isotopically enriched 28-Si single crystal by dynamic grating radiometry",
abstract = "In the past decade it has been suggested that the isotopic enrichment of 28-silicon enhances its thermal properties. Thus, 28-silicon is suitable as a heat sink in large-scale integrated circuits. Although some studies have focused on the measurement of isotopically enriched silicon's thermal properties, accurate experimental data are not sufficient because of this material's high conductivity and large heat capacity which make measurement difficult. However, the dynamic grating radiometry (DGR) method has been successfully developed to measure the thermal diffusivity of 28-silicon. In the DGR method, the sample is heated by interference of two pulsed laser beams, and the temperature decay is monitored by an infrared detector. By analyzing the temperature changes of the peaks and valleys of the thermal grating, the thermal diffusivities parallel and perpendicular to the sample surface are obtained simultaneously. In this paper, the optimum conditions of the experimental setup for measuring isotopically enriched silicon are discussed. The comparison of thermal diffusivities between 28-silicon and natural silicon (with a thickness of about 100 μm) is presented, and the applicability of DGR to isotope engineering is reported.",
keywords = "Dynamic grating radiometry, High-conductivity thin film, Isotope engineering, Isotopically enriched 28-silicon, Thermal diffusivity",
author = "Yoshihiro Taguchi and Yuji Nagasaka",
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AU - Taguchi, Yoshihiro

AU - Nagasaka, Yuji

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N2 - In the past decade it has been suggested that the isotopic enrichment of 28-silicon enhances its thermal properties. Thus, 28-silicon is suitable as a heat sink in large-scale integrated circuits. Although some studies have focused on the measurement of isotopically enriched silicon's thermal properties, accurate experimental data are not sufficient because of this material's high conductivity and large heat capacity which make measurement difficult. However, the dynamic grating radiometry (DGR) method has been successfully developed to measure the thermal diffusivity of 28-silicon. In the DGR method, the sample is heated by interference of two pulsed laser beams, and the temperature decay is monitored by an infrared detector. By analyzing the temperature changes of the peaks and valleys of the thermal grating, the thermal diffusivities parallel and perpendicular to the sample surface are obtained simultaneously. In this paper, the optimum conditions of the experimental setup for measuring isotopically enriched silicon are discussed. The comparison of thermal diffusivities between 28-silicon and natural silicon (with a thickness of about 100 μm) is presented, and the applicability of DGR to isotope engineering is reported.

AB - In the past decade it has been suggested that the isotopic enrichment of 28-silicon enhances its thermal properties. Thus, 28-silicon is suitable as a heat sink in large-scale integrated circuits. Although some studies have focused on the measurement of isotopically enriched silicon's thermal properties, accurate experimental data are not sufficient because of this material's high conductivity and large heat capacity which make measurement difficult. However, the dynamic grating radiometry (DGR) method has been successfully developed to measure the thermal diffusivity of 28-silicon. In the DGR method, the sample is heated by interference of two pulsed laser beams, and the temperature decay is monitored by an infrared detector. By analyzing the temperature changes of the peaks and valleys of the thermal grating, the thermal diffusivities parallel and perpendicular to the sample surface are obtained simultaneously. In this paper, the optimum conditions of the experimental setup for measuring isotopically enriched silicon are discussed. The comparison of thermal diffusivities between 28-silicon and natural silicon (with a thickness of about 100 μm) is presented, and the applicability of DGR to isotope engineering is reported.

KW - Dynamic grating radiometry

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KW - Isotope engineering

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