Three-dimensional Electrodes formation using liquid metal in micro channels for 3-axis Capacitive Force Sensor

Tatsuho Nagatomo, Norihisa Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, we propose three-dimensional formation of electrodes made of liquid metal. First, three-dimensional micro channels are formed by stacking PDMS layers. Second, liquid metal, galinstan, is introduced into the channels to form electrodes and wirings. This process is crucial to develop miniaturized 3-axis capacitive force sensor. In our previous work, we proposed a ball-point-pen like capacitive sensor, however, it was difficult to be miniaturized to be mounted onto an endoscope retaining the function. We successfully manufactured 3-axis cylindrical capacitive force sensor, 5 mm in diameter and small enough to be mounted onto an endoscope. We experimentally characterized the sensor. The proposed and demonstrated sensor can be readily applicable for endoscopic palpation.

Original languageEnglish
Title of host publication2017 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society
Subtitle of host publicationSmarter Technology for a Healthier World, EMBC 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1579-1582
Number of pages4
ISBN (Electronic)9781509028092
DOIs
Publication statusPublished - 2017 Sep 13
Event39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2017 - Jeju Island, Korea, Republic of
Duration: 2017 Jul 112017 Jul 15

Other

Other39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2017
CountryKorea, Republic of
CityJeju Island
Period17/7/1117/7/15

ASJC Scopus subject areas

  • Signal Processing
  • Biomedical Engineering
  • Computer Vision and Pattern Recognition
  • Health Informatics

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  • Cite this

    Nagatomo, T., & Miki, N. (2017). Three-dimensional Electrodes formation using liquid metal in micro channels for 3-axis Capacitive Force Sensor. In 2017 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Smarter Technology for a Healthier World, EMBC 2017 - Proceedings (pp. 1579-1582). [8037139] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EMBC.2017.8037139