Abstract
Three dimensional structures on SU-8 photoresist were fabricated by gray-scale lithography. A thin glass substrate was plastered over with SU-8 and UV light was irradiated through the glass substrate. SU-8 structures with maximum 400 µm height and strong adhesion to the substrate were achieved by the lithography technique. The relation between gray-scale value and the resist height were evaluated and the maximum surface roughness of the structure was 0.98 µm. Three dimensional structures such as micro capillaries were fabricated on PDMS from the SU-8 structures by molding.
Original language | English |
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Pages (from-to) | 359-363 |
Number of pages | 5 |
Journal | ieej transactions on sensors and micromachines |
Volume | 124 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2006 |
Keywords
- 3-D micro machining
- PDMS
- SU-8
- gray-scale lithography
- molding
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering