Three dimensional optical emission tomography of an inductively coupled plasma

Akifumi Okigawa, Masahiro Tadokoro, Akihiko Itoh, Nobuhiko Nakano, Zoran Lj Petrović, Toshiaki Makabe

Research output: Contribution to journalArticle

42 Citations (Scopus)

Abstract

The three dimensional distribution of the net production rate of excited species in an inductively coupled plasma (ICP) reactor in Ar has been measured as a function of pressure and discharge power. The ICP reactor is driven by a single turn radio-frequency current coil at 13.56 MHz. Robot assisted optical emission tomography was used in order to obtain radial profiles of emission at different distances from the coil thus giving effectively a three dimensional distribution of the net excitation rate as well as the number density of excited states. Under some conditions azimuthal symmetry of the discharge is broken mostly at higher pressures and higher powers. We have covered a range of pressures between 15 and 500mTorr and powers between 50 W and 400 W. The conditions for producing a uniform distribution of excited atoms as a representative of active species, are discussed.

Original languageEnglish
Pages (from-to)4605-4616
Number of pages12
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number7 SUPPL. B
Publication statusPublished - 1997 Jul

Fingerprint

Inductively coupled plasma
Tomography
light emission
tomography
coils
reactors
Crystal symmetry
robots
Excited states
excitation
radio frequencies
Robots
Atoms
symmetry
profiles
atoms

Keywords

  • Argon
  • Computer tomography
  • Inductively coupled plasma
  • Net excitation rate
  • Plasma processing

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Engineering(all)

Cite this

Three dimensional optical emission tomography of an inductively coupled plasma. / Okigawa, Akifumi; Tadokoro, Masahiro; Itoh, Akihiko; Nakano, Nobuhiko; Petrović, Zoran Lj; Makabe, Toshiaki.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 36, No. 7 SUPPL. B, 07.1997, p. 4605-4616.

Research output: Contribution to journalArticle

Okigawa, Akifumi ; Tadokoro, Masahiro ; Itoh, Akihiko ; Nakano, Nobuhiko ; Petrović, Zoran Lj ; Makabe, Toshiaki. / Three dimensional optical emission tomography of an inductively coupled plasma. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 1997 ; Vol. 36, No. 7 SUPPL. B. pp. 4605-4616.
@article{f4971a783ee9456d8e9db5f81da06aae,
title = "Three dimensional optical emission tomography of an inductively coupled plasma",
abstract = "The three dimensional distribution of the net production rate of excited species in an inductively coupled plasma (ICP) reactor in Ar has been measured as a function of pressure and discharge power. The ICP reactor is driven by a single turn radio-frequency current coil at 13.56 MHz. Robot assisted optical emission tomography was used in order to obtain radial profiles of emission at different distances from the coil thus giving effectively a three dimensional distribution of the net excitation rate as well as the number density of excited states. Under some conditions azimuthal symmetry of the discharge is broken mostly at higher pressures and higher powers. We have covered a range of pressures between 15 and 500mTorr and powers between 50 W and 400 W. The conditions for producing a uniform distribution of excited atoms as a representative of active species, are discussed.",
keywords = "Argon, Computer tomography, Inductively coupled plasma, Net excitation rate, Plasma processing",
author = "Akifumi Okigawa and Masahiro Tadokoro and Akihiko Itoh and Nobuhiko Nakano and Petrović, {Zoran Lj} and Toshiaki Makabe",
year = "1997",
month = "7",
language = "English",
volume = "36",
pages = "4605--4616",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "7 SUPPL. B",

}

TY - JOUR

T1 - Three dimensional optical emission tomography of an inductively coupled plasma

AU - Okigawa, Akifumi

AU - Tadokoro, Masahiro

AU - Itoh, Akihiko

AU - Nakano, Nobuhiko

AU - Petrović, Zoran Lj

AU - Makabe, Toshiaki

PY - 1997/7

Y1 - 1997/7

N2 - The three dimensional distribution of the net production rate of excited species in an inductively coupled plasma (ICP) reactor in Ar has been measured as a function of pressure and discharge power. The ICP reactor is driven by a single turn radio-frequency current coil at 13.56 MHz. Robot assisted optical emission tomography was used in order to obtain radial profiles of emission at different distances from the coil thus giving effectively a three dimensional distribution of the net excitation rate as well as the number density of excited states. Under some conditions azimuthal symmetry of the discharge is broken mostly at higher pressures and higher powers. We have covered a range of pressures between 15 and 500mTorr and powers between 50 W and 400 W. The conditions for producing a uniform distribution of excited atoms as a representative of active species, are discussed.

AB - The three dimensional distribution of the net production rate of excited species in an inductively coupled plasma (ICP) reactor in Ar has been measured as a function of pressure and discharge power. The ICP reactor is driven by a single turn radio-frequency current coil at 13.56 MHz. Robot assisted optical emission tomography was used in order to obtain radial profiles of emission at different distances from the coil thus giving effectively a three dimensional distribution of the net excitation rate as well as the number density of excited states. Under some conditions azimuthal symmetry of the discharge is broken mostly at higher pressures and higher powers. We have covered a range of pressures between 15 and 500mTorr and powers between 50 W and 400 W. The conditions for producing a uniform distribution of excited atoms as a representative of active species, are discussed.

KW - Argon

KW - Computer tomography

KW - Inductively coupled plasma

KW - Net excitation rate

KW - Plasma processing

UR - http://www.scopus.com/inward/record.url?scp=0031176034&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031176034&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0031176034

VL - 36

SP - 4605

EP - 4616

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 7 SUPPL. B

ER -