Three dimensional optical emission tomography of an inductively coupled plasma

Akifumi Okigawa, Masahiro Tadokoro, Akihiko Itoh, Nobuhiko Nakano, Zoran Lj Petrović, Toshiaki Makabe

Research output: Contribution to journalArticle

43 Citations (Scopus)

Abstract

The three dimensional distribution of the net production rate of excited species in an inductively coupled plasma (ICP) reactor in Ar has been measured as a function of pressure and discharge power. The ICP reactor is driven by a single turn radio-frequency current coil at 13.56 MHz. Robot assisted optical emission tomography was used in order to obtain radial profiles of emission at different distances from the coil thus giving effectively a three dimensional distribution of the net excitation rate as well as the number density of excited states. Under some conditions azimuthal symmetry of the discharge is broken mostly at higher pressures and higher powers. We have covered a range of pressures between 15 and 500mTorr and powers between 50 W and 400 W. The conditions for producing a uniform distribution of excited atoms as a representative of active species, are discussed.

Original languageEnglish
Pages (from-to)4605-4616
Number of pages12
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number7 SUPPL. B
Publication statusPublished - 1997 Jul 1

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Keywords

  • Argon
  • Computer tomography
  • Inductively coupled plasma
  • Net excitation rate
  • Plasma processing

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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