Three-dimensional photonic crystals based on double-angled etching and wafer-fusion techniques

Shigeki Takahashi, Makoto Okano, Masahiro Imada, Susumu Noda

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

Abstract

We propose a method for the realization of three-dimensional photonic crystals by combining a wafer-fusion technique with a two-stage angled etching process. Etching at an angle of 45° to the substrate creates woodpile (or stacked striped) structures, and artificial defects and light emitters can then be introduced by the wafer-fusion technique, thereby considerably reducing the number of processes required. Here, we determine the required thickness of the photonic crystals by calculating the transmission properties and quality factors of point-defect cavities. Furthermore, we demonstrate the feasibility of angled etching using an inductively coupled plasma-etching system at cryogenic temperatures.

Original languageEnglish
Article number123106
JournalApplied Physics Letters
Volume89
Issue number12
DOIs
Publication statusPublished - 2006
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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