Three-dimensional photonic crystals fabricated by double-angled plasma etching

Shigeki Takahashi, Takeshi Nakamori, Makoto Okano, Masahiro Imada, Susumu Noda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.

Original languageEnglish
Title of host publicationQuantum Electronics and Laser Science Conference, QELS 2007
PublisherOptical Society of America
ISBN (Print)1557528349, 9781557528346
Publication statusPublished - 2007 Jan 1
Externally publishedYes
EventQuantum Electronics and Laser Science Conference, QELS 2007 - Baltimore, MD, United States
Duration: 2007 May 62007 May 6

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherQuantum Electronics and Laser Science Conference, QELS 2007
CountryUnited States
CityBaltimore, MD
Period07/5/607/5/6

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Takahashi, S., Nakamori, T., Okano, M., Imada, M., & Noda, S. (2007). Three-dimensional photonic crystals fabricated by double-angled plasma etching. In Quantum Electronics and Laser Science Conference, QELS 2007 (Optics InfoBase Conference Papers). Optical Society of America.