Three-dimensional remarkable images of low-pressure H2 ICP in E-mode

Y. Miyoshi; M. Miyauchi; A. Oguni; T. Makabe

doi:10.1109/TPS.2005.845338

Three-dimensional remarkable images of low-pressure H₂ ICP in E-mode

Y. Miyoshi, M. Miyauchi, A. Oguni, T. Makabe

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct image in H₂ ICP in the E-mode, i.e., the presence of two independent plasmas in a low-pressure region.

Original language	English
Pages (from-to)	362-363
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	33
Issue number	2 I
DOIs	https://doi.org/10.1109/TPS.2005.845338
Publication status	Published - 2005 Apr
Externally published	Yes

Keywords

Computerized tomography
E-mode
Hydrogen
Inductively coupled plasma
Optical emission spectroscopy

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

Access to Document

10.1109/TPS.2005.845338

Cite this

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abstract = "Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct image in H2 ICP in the E-mode, i.e., the presence of two independent plasmas in a low-pressure region.",

keywords = "Computerized tomography, E-mode, Hydrogen, Inductively coupled plasma, Optical emission spectroscopy",

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AU - Miyoshi, Y.

AU - Miyauchi, M.

AU - Oguni, A.

AU - Makabe, T.

PY - 2005/4

Y1 - 2005/4

N2 - Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct image in H2 ICP in the E-mode, i.e., the presence of two independent plasmas in a low-pressure region.

AB - Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct image in H2 ICP in the E-mode, i.e., the presence of two independent plasmas in a low-pressure region.

KW - Computerized tomography

KW - E-mode

KW - Hydrogen

KW - Inductively coupled plasma

KW - Optical emission spectroscopy

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