Three-dimensional remarkable images of low-pressure H2 ICP in E-mode

Y. Miyoshi, M. Miyauchi, A. Oguni, T. Makabe

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct image in H2 ICP in the E-mode, i.e., the presence of two independent plasmas in a low-pressure region.

Original languageEnglish
Pages (from-to)362-363
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume33
Issue number2 I
DOIs
Publication statusPublished - 2005 Apr

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low pressure
tomography
optical emission spectroscopy
radio frequencies
hydrogen

Keywords

  • Computerized tomography
  • E-mode
  • Hydrogen
  • Inductively coupled plasma
  • Optical emission spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

Cite this

Three-dimensional remarkable images of low-pressure H2 ICP in E-mode. / Miyoshi, Y.; Miyauchi, M.; Oguni, A.; Makabe, T.

In: IEEE Transactions on Plasma Science, Vol. 33, No. 2 I, 04.2005, p. 362-363.

Research output: Contribution to journalArticle

Miyoshi, Y. ; Miyauchi, M. ; Oguni, A. ; Makabe, T. / Three-dimensional remarkable images of low-pressure H2 ICP in E-mode. In: IEEE Transactions on Plasma Science. 2005 ; Vol. 33, No. 2 I. pp. 362-363.
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