Abstract
Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were synthesized by changing the contents, x values, using the arc ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti(1-x)Al(x)N films changed from the NaCl into wurtzite type at x = 0.6-0.7, while Ti(1-x)Cr(x)N and Ti(1-x)Zr(x)N kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti(1-x)Al(x)N and Ti(1-x)Cr(x)N monotonously decreased from 4.23 Å (x = 0) down to 4.17 Å (x = 0.6) and to 4.16 Å (x = 1.0), respectively. On the other hand, the lattice parameters of Ti(1-x)Zr(x)N films monotonously increased from 4.23 Å (x = 0) up to 4.58 Å (x = 1.0). The maximum micro-hardness of Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were Hv 3200 (x = 0.6), 3000 (x = 0.5) and 3000 (x = 0.2), respectively. (C) 2000 Published by Elsevier Science S.A. All rights reserved.
| Original language | English |
|---|---|
| Pages (from-to) | 76-79 |
| Number of pages | 4 |
| Journal | Surface and Coatings Technology |
| Volume | 132 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2000 Oct |
Keywords
- Arc ion plating
- Ti(1-x)Al(x)N
- Ti(1-x)Cr(x)N
- Ti(1-x)Zr(x)N
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry