Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films synthesized by the AIP method

Hiroyuki Hasegawa, Ayako Kimura, Tetsuya Suzuki

Research output: Contribution to journalArticle

45 Citations (Scopus)

Abstract

Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were synthesized by changing the contents, x values, using the arc ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti(1-x)Al(x)N films changed from the NaCl into wurtzite type at x = 0.6-0.7, while Ti(1-x)Cr(x)N and Ti(1-x)Zr(x)N kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti(1-x)Al(x)N and Ti(1-x)Cr(x)N monotonously decreased from 4.23 Å (x = 0) down to 4.17 Å (x = 0.6) and to 4.16 Å (x = 1.0), respectively. On the other hand, the lattice parameters of Ti(1-x)Zr(x)N films monotonously increased from 4.23 Å (x = 0) up to 4.58 Å (x = 1.0). The maximum micro-hardness of Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were Hv 3200 (x = 0.6), 3000 (x = 0.5) and 3000 (x = 0.2), respectively. (C) 2000 Published by Elsevier Science S.A. All rights reserved.

Original languageEnglish
Pages (from-to)76-79
Number of pages4
JournalSurface and Coatings Technology
Volume132
Issue number1
DOIs
Publication statusPublished - 2000 Oct 1

Keywords

  • Arc ion plating
  • Ti(1-x)Al(x)N
  • Ti(1-x)Cr(x)N
  • Ti(1-x)Zr(x)N

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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