### Abstract

The temporal behaviour of electron swarm transport in an RF field has been investigated for the electron non-conservative case in CH_{4}, H_{2} and their mixture by using the first three terms in Legendre polynomials with a Fourier expansion in time for the electron velocity distribution from the time-dependent Boltzmann equation. Calculations have been made for reduced RMS electric fields E_{R}/N in the range 15 to 70 Td and reduced angular frequencies ω/N in the range 10^{5}/N_{0} to 10^{10}/N_{0} cm^{3} s^{-1}, where N_{0} is the number density at 1 Torr and 273 K. The phenomenon of negative differential conductivity in CH_{4} has been studied as a parameter of ω//N. The gas mixture effect in an RF field is also discussed.

Original language | English |
---|---|

Pages (from-to) | 686-693 |

Number of pages | 8 |

Journal | Journal of Physics D: Applied Physics |

Volume | 23 |

Issue number | 6 |

DOIs | |

Publication status | Published - 1990 |

Externally published | Yes |

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### ASJC Scopus subject areas

- Physics and Astronomy (miscellaneous)

### Cite this

_{4}and H

_{2}.

*Journal of Physics D: Applied Physics*,

*23*(6), 686-693. https://doi.org/10.1088/0022-3727/23/6/008

**Time-dependent electron swarm parameters in RF fields in CH _{4} and H_{2}.** / Goto, Naohiko; Makabe, Toshiaki.

Research output: Contribution to journal › Article

_{4}and H

_{2}',

*Journal of Physics D: Applied Physics*, vol. 23, no. 6, pp. 686-693. https://doi.org/10.1088/0022-3727/23/6/008

_{4}and H

_{2}. Journal of Physics D: Applied Physics. 1990;23(6):686-693. https://doi.org/10.1088/0022-3727/23/6/008

}

TY - JOUR

T1 - Time-dependent electron swarm parameters in RF fields in CH4 and H2

AU - Goto, Naohiko

AU - Makabe, Toshiaki

PY - 1990

Y1 - 1990

N2 - The temporal behaviour of electron swarm transport in an RF field has been investigated for the electron non-conservative case in CH4, H2 and their mixture by using the first three terms in Legendre polynomials with a Fourier expansion in time for the electron velocity distribution from the time-dependent Boltzmann equation. Calculations have been made for reduced RMS electric fields ER/N in the range 15 to 70 Td and reduced angular frequencies ω/N in the range 105/N0 to 1010/N0 cm3 s-1, where N0 is the number density at 1 Torr and 273 K. The phenomenon of negative differential conductivity in CH4 has been studied as a parameter of ω//N. The gas mixture effect in an RF field is also discussed.

AB - The temporal behaviour of electron swarm transport in an RF field has been investigated for the electron non-conservative case in CH4, H2 and their mixture by using the first three terms in Legendre polynomials with a Fourier expansion in time for the electron velocity distribution from the time-dependent Boltzmann equation. Calculations have been made for reduced RMS electric fields ER/N in the range 15 to 70 Td and reduced angular frequencies ω/N in the range 105/N0 to 1010/N0 cm3 s-1, where N0 is the number density at 1 Torr and 273 K. The phenomenon of negative differential conductivity in CH4 has been studied as a parameter of ω//N. The gas mixture effect in an RF field is also discussed.

UR - http://www.scopus.com/inward/record.url?scp=0025445545&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025445545&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/23/6/008

DO - 10.1088/0022-3727/23/6/008

M3 - Article

AN - SCOPUS:0025445545

VL - 23

SP - 686

EP - 693

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

SN - 0022-3727

IS - 6

ER -