Time-dependent electron swarm parameters in RF fields in CH4 and H2

Naohiko Goto, Toshiaki Makabe

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

The temporal behaviour of electron swarm transport in an RF field has been investigated for the electron non-conservative case in CH4, H2 and their mixture by using the first three terms in Legendre polynomials with a Fourier expansion in time for the electron velocity distribution from the time-dependent Boltzmann equation. Calculations have been made for reduced RMS electric fields ER/N in the range 15 to 70 Td and reduced angular frequencies ω/N in the range 105/N0 to 1010/N0 cm3 s-1, where N0 is the number density at 1 Torr and 273 K. The phenomenon of negative differential conductivity in CH4 has been studied as a parameter of ω//N. The gas mixture effect in an RF field is also discussed.

Original languageEnglish
Pages (from-to)686-693
Number of pages8
JournalJournal of Physics D: Applied Physics
Volume23
Issue number6
DOIs
Publication statusPublished - 1990
Externally publishedYes

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Electrons
electrons
Legendre functions
Boltzmann equation
Velocity distribution
Gas mixtures
gas mixtures
velocity distribution
Electric fields
Polynomials
conductivity
expansion
electric fields

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Time-dependent electron swarm parameters in RF fields in CH4 and H2. / Goto, Naohiko; Makabe, Toshiaki.

In: Journal of Physics D: Applied Physics, Vol. 23, No. 6, 1990, p. 686-693.

Research output: Contribution to journalArticle

Goto, Naohiko ; Makabe, Toshiaki. / Time-dependent electron swarm parameters in RF fields in CH4 and H2. In: Journal of Physics D: Applied Physics. 1990 ; Vol. 23, No. 6. pp. 686-693.
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