Time-Dependent RF Swarm Transport by Direct Numerical Procedure of the Boltzmann Equation

Kenji Maeda, Toshiaki Makabe

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

Electron swarm transport in rf fields under spatial homogeneity has been investigated by a direct numerical procedure (DNP) of the Boltzmann equation. The accuracy and validity of the DNP is examined by comparison with the previous results in Reid's inelastic ramp model gas in dc fields. The electron velocity distribution with strong nonlinear time variation and high anisotropy is demonstrated and discussed in Ar with the rf swarm parameter in order to show the power of the DNP over a wide range of frequency.

Original languageEnglish
Number of pages1
JournalJapanese journal of applied physics
Volume33
Issue number7S
DOIs
Publication statusPublished - 1994 Jul

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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