TY - JOUR
T1 - Time-Dependent RF Swarm Transport by Direct Numerical Procedure of the Boltzmann Equation
AU - Maeda, Kenji
AU - Makabe, Toshiaki
PY - 1994/7
Y1 - 1994/7
N2 - Electron swarm transport in rf fields under spatial homogeneity has been investigated by a direct numerical procedure (DNP) of the Boltzmann equation. The accuracy and validity of the DNP is examined by comparison with the previous results in Reid's inelastic ramp model gas in dc fields. The electron velocity distribution with strong nonlinear time variation and high anisotropy is demonstrated and discussed in Ar with the rf swarm parameter in order to show the power of the DNP over a wide range of frequency.
AB - Electron swarm transport in rf fields under spatial homogeneity has been investigated by a direct numerical procedure (DNP) of the Boltzmann equation. The accuracy and validity of the DNP is examined by comparison with the previous results in Reid's inelastic ramp model gas in dc fields. The electron velocity distribution with strong nonlinear time variation and high anisotropy is demonstrated and discussed in Ar with the rf swarm parameter in order to show the power of the DNP over a wide range of frequency.
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U2 - 10.1143/JJAP.33.4173
DO - 10.1143/JJAP.33.4173
M3 - Article
AN - SCOPUS:0028462652
SN - 0021-4922
VL - 33
SP - 4173
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 7S
ER -