Time response characteristics of a highly sensitive barometric pressure change sensor based on MEMS piezoresistive cantilevers

Research output: Contribution to journalReview article

Abstract

This paper describes the frequency characteristics of a highly sensitive barometric pressure change sensor. Here, we propose a method to measure pressure changes based on microelectromechanical systems piezoresistive cantilevers and an air chamber. The proposed sensor structure realizes a mechanical high pass filter to eliminate the influence of the barometric pressure change due to meteorological variations. The experimental frequency characteristics indicate that the proposed sensor unit with a high resolution of less than 0.1 Pa from 0.1 to 10 Hz responds to pressure changes with a high pass filter property according to the chamber volume size.

Original languageEnglish
Article number070906
JournalJapanese journal of applied physics
Volume59
Issue number7
DOIs
Publication statusPublished - 2020 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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