Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

A. Itoh; T. Makabe; N. Shimura; S. Tougo

doi:10.1109/27.491736

Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

A. Itoh, T. Makabe, N. Shimura, S. Tougo

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.

Original language	English
Pages (from-to)	109-110
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	24
Issue number	1
DOIs	https://doi.org/10.1109/27.491736
Publication status	Published - 1996
Externally published	Yes

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

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10.1109/27.491736

Cite this

@article{0a75fa7502e1410fbc8fdcab9599fd4c,

title = "Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge",

abstract = "Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.",

author = "A. Itoh and T. Makabe and N. Shimura and S. Tougo",

year = "1996",

doi = "10.1109/27.491736",

language = "English",

volume = "24",

pages = "109--110",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1",

}

TY - JOUR

T1 - Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

AU - Itoh, A.

AU - Makabe, T.

AU - Shimura, N.

AU - Tougo, S.

PY - 1996

Y1 - 1996

N2 - Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.

AB - Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.

UR - http://www.scopus.com/inward/record.url?scp=0030085632&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030085632&partnerID=8YFLogxK

U2 - 10.1109/27.491736

DO - 10.1109/27.491736

M3 - Article

AN - SCOPUS:0030085632

SN - 0093-3813

VL - 24

SP - 109

EP - 110

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 1

ER -

Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

Abstract

ASJC Scopus subject areas

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