Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

A. Itoh, T. Makabe, N. Shimura, S. Tougo

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.

Original languageEnglish
Pages (from-to)109-110
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume24
Issue number1
DOIs
Publication statusPublished - 1996
Externally publishedYes

Fingerprint

direct current
robotics
robots
light emission
optical absorption
sputtering

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

Cite this

Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge. / Itoh, A.; Makabe, T.; Shimura, N.; Tougo, S.

In: IEEE Transactions on Plasma Science, Vol. 24, No. 1, 1996, p. 109-110.

Research output: Contribution to journalArticle

@article{0a75fa7502e1410fbc8fdcab9599fd4c,
title = "Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge",
abstract = "Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.",
author = "A. Itoh and T. Makabe and N. Shimura and S. Tougo",
year = "1996",
doi = "10.1109/27.491736",
language = "English",
volume = "24",
pages = "109--110",
journal = "IEEE Transactions on Plasma Science",
issn = "0093-3813",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "1",

}

TY - JOUR

T1 - Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

AU - Itoh, A.

AU - Makabe, T.

AU - Shimura, N.

AU - Tougo, S.

PY - 1996

Y1 - 1996

N2 - Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.

AB - Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.

UR - http://www.scopus.com/inward/record.url?scp=0030085632&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030085632&partnerID=8YFLogxK

U2 - 10.1109/27.491736

DO - 10.1109/27.491736

M3 - Article

AN - SCOPUS:0030085632

VL - 24

SP - 109

EP - 110

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

IS - 1

ER -