Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

A. Itoh, T. Makabe, N. Shimura, S. Tougo

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.

Original languageEnglish
Pages (from-to)109-110
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume24
Issue number1
DOIs
Publication statusPublished - 1996 Dec 1

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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