Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.
|Number of pages||2|
|Journal||IEEE Transactions on Plasma Science|
|Publication status||Published - 1996|
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Condensed Matter Physics