Towards nanostructuring with femtosecond laser pulses

Jürgen Koch, Takasumi Tanabe, Frank Korte, Carsten Fallnich, Andreas Ostendorf, Boris N. Chichkov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Micro- and nanostructuring are very important for the fabrication of new materials and multifunctional devices. Existing photo-lithographic technologies can only be applied to a limited number of materials and used on plane surfaces. Whereas, microstructuring with femtosecond laser pulses has established itself as an excellent and universal tool for micro-processing, it is still unclear what are the limits of this technology. It is of great interest to use this technique also for nanostructuring. With tightly focused femtosecond laser pulses one can produce sub-micrometer holes and structures whose quality depends on the material. We present new results on nanostructuring of different materials with femtosecond laser pulses in an attempt to make this an universal technology, and discuss its reproducibility, and further prospects for quality control.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsI. Miyamoto, H. Helvajian, K. Itoh, K.F. Kobayashi, A. Ostendorf, K. Sugioka
Pages743-748
Number of pages6
Volume5662
DOIs
Publication statusPublished - 2004
EventFifth International Symposium on Laser Precision Microfabrication - Nara, Japan
Duration: 2004 May 112004 May 14

Other

OtherFifth International Symposium on Laser Precision Microfabrication
CountryJapan
CityNara
Period04/5/1104/5/14

Fingerprint

Ultrashort pulses
pulses
lasers
quality control
micrometers
Quality control
fabrication
Fabrication
Processing

Keywords

  • Femtosecond lasers
  • Material processing
  • Nanostructuring

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Koch, J., Tanabe, T., Korte, F., Fallnich, C., Ostendorf, A., & Chichkov, B. N. (2004). Towards nanostructuring with femtosecond laser pulses. In I. Miyamoto, H. Helvajian, K. Itoh, K. F. Kobayashi, A. Ostendorf, & K. Sugioka (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5662, pp. 743-748). [118] https://doi.org/10.1117/12.596773

Towards nanostructuring with femtosecond laser pulses. / Koch, Jürgen; Tanabe, Takasumi; Korte, Frank; Fallnich, Carsten; Ostendorf, Andreas; Chichkov, Boris N.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / I. Miyamoto; H. Helvajian; K. Itoh; K.F. Kobayashi; A. Ostendorf; K. Sugioka. Vol. 5662 2004. p. 743-748 118.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Koch, J, Tanabe, T, Korte, F, Fallnich, C, Ostendorf, A & Chichkov, BN 2004, Towards nanostructuring with femtosecond laser pulses. in I Miyamoto, H Helvajian, K Itoh, KF Kobayashi, A Ostendorf & K Sugioka (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5662, 118, pp. 743-748, Fifth International Symposium on Laser Precision Microfabrication, Nara, Japan, 04/5/11. https://doi.org/10.1117/12.596773
Koch J, Tanabe T, Korte F, Fallnich C, Ostendorf A, Chichkov BN. Towards nanostructuring with femtosecond laser pulses. In Miyamoto I, Helvajian H, Itoh K, Kobayashi KF, Ostendorf A, Sugioka K, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5662. 2004. p. 743-748. 118 https://doi.org/10.1117/12.596773
Koch, Jürgen ; Tanabe, Takasumi ; Korte, Frank ; Fallnich, Carsten ; Ostendorf, Andreas ; Chichkov, Boris N. / Towards nanostructuring with femtosecond laser pulses. Proceedings of SPIE - The International Society for Optical Engineering. editor / I. Miyamoto ; H. Helvajian ; K. Itoh ; K.F. Kobayashi ; A. Ostendorf ; K. Sugioka. Vol. 5662 2004. pp. 743-748
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