Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography

Y. Miyoshi, Z. Lj Petrović, T. Makabe

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

Optical emission spectroscopy is used together with computerized tomography to describe the transition between the capacitively coupled (E) mode and inductively coupled (H) mode in an inductively coupled plasma reactor. Previous studies of the transition and minimum sustaining conditions were based mainly on measurements of electrical characteristics. In this paper, we show how two-dimensional maps of emission may improve understanding of the mechanisms that control the two modes and the transition.

Original languageEnglish
Pages (from-to)130-131
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume30
Issue number1 I
DOIs
Publication statusPublished - 2002 Feb 1

Keywords

  • Computerized tomography
  • E-H transition
  • Hysteresis characteristics
  • ICP
  • Optical emission spectroscopy

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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