Optical emission spectroscopy is used together with computerized tomography to describe the transition between the capacitively coupled (E) mode and inductively coupled (H) mode in an inductively coupled plasma reactor. Previous studies of the transition and minimum sustaining conditions were based mainly on measurements of electrical characteristics. In this paper, we show how two-dimensional maps of emission may improve understanding of the mechanisms that control the two modes and the transition.
- Computerized tomography
- E-H transition
- Hysteresis characteristics
- Optical emission spectroscopy
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Condensed Matter Physics