Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography

Y. Miyoshi; Z. Lj Petrović; T. Makabe

doi:10.1109/TPS.2002.1003958

Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography

Y. Miyoshi, Z. Lj Petrović, T. Makabe

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Optical emission spectroscopy is used together with computerized tomography to describe the transition between the capacitively coupled (E) mode and inductively coupled (H) mode in an inductively coupled plasma reactor. Previous studies of the transition and minimum sustaining conditions were based mainly on measurements of electrical characteristics. In this paper, we show how two-dimensional maps of emission may improve understanding of the mechanisms that control the two modes and the transition.

Original language	English
Pages (from-to)	130-131
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	30
Issue number	1 I
DOIs	https://doi.org/10.1109/TPS.2002.1003958
Publication status	Published - 2002 Feb
Externally published	Yes

Keywords

Computerized tomography
E-H transition
Hysteresis characteristics
ICP
Optical emission spectroscopy

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

Access to Document

10.1109/TPS.2002.1003958

Cite this

@article{53db286e3da74da4a47ad5acc122a2b5,

title = "Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography",

abstract = "Optical emission spectroscopy is used together with computerized tomography to describe the transition between the capacitively coupled (E) mode and inductively coupled (H) mode in an inductively coupled plasma reactor. Previous studies of the transition and minimum sustaining conditions were based mainly on measurements of electrical characteristics. In this paper, we show how two-dimensional maps of emission may improve understanding of the mechanisms that control the two modes and the transition.",

keywords = "Computerized tomography, E-H transition, Hysteresis characteristics, ICP, Optical emission spectroscopy",

author = "Y. Miyoshi and Petrovi{\'c}, {Z. Lj} and T. Makabe",

year = "2002",

month = feb,

doi = "10.1109/TPS.2002.1003958",

language = "English",

volume = "30",

pages = "130--131",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1 I",

}

TY - JOUR

T1 - Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography

AU - Miyoshi, Y.

AU - Petrović, Z. Lj

AU - Makabe, T.

PY - 2002/2

Y1 - 2002/2

N2 - Optical emission spectroscopy is used together with computerized tomography to describe the transition between the capacitively coupled (E) mode and inductively coupled (H) mode in an inductively coupled plasma reactor. Previous studies of the transition and minimum sustaining conditions were based mainly on measurements of electrical characteristics. In this paper, we show how two-dimensional maps of emission may improve understanding of the mechanisms that control the two modes and the transition.

AB - Optical emission spectroscopy is used together with computerized tomography to describe the transition between the capacitively coupled (E) mode and inductively coupled (H) mode in an inductively coupled plasma reactor. Previous studies of the transition and minimum sustaining conditions were based mainly on measurements of electrical characteristics. In this paper, we show how two-dimensional maps of emission may improve understanding of the mechanisms that control the two modes and the transition.

KW - Computerized tomography

KW - E-H transition

KW - Hysteresis characteristics

KW - ICP

KW - Optical emission spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=0036478255&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036478255&partnerID=8YFLogxK

U2 - 10.1109/TPS.2002.1003958

DO - 10.1109/TPS.2002.1003958

M3 - Article

AN - SCOPUS:0036478255

SN - 0093-3813

VL - 30

SP - 130

EP - 131

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 1 I

ER -

Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this