Transport coefficients for electrons in mixtures of Ar and HBr

Olivera Šašić, Saša Dujko, Zoran Lj Petrović, Toshiaki Makabe

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12 Citations (Scopus)

Abstract

We present calculations of swarm data and rate coefficients for electrons in mixtures of Ar and HBr. The transport data were calculated using a Monte Carlo simulation over a broad range of E/N (electric field E to the gas number density N ratio) and with the idea to provide a basis for models of plasma etching involving HBr. The total cross section has an almost a constant collision frequency, which leads to rather uneventful E/N dependences of the transport data in pure HBr, but the mixtures with Ar involve more complex kinetic phenomena.

Original languageEnglish
Pages (from-to)3560-3565
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number6 A
DOIs
Publication statusPublished - 2007 Jun 6

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Keywords

  • Collisions
  • Electron transport
  • Fluid models
  • HBr
  • Plasma etching
  • Swarms
  • Transport coefficients

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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