Tunable metamaterials by controlling sub-micron gap for the THz range

Akihiro Isozaki, Tetsuo Kan, Hidetoshi Takahashi, Natsuki Kanda, Natsuki Nemoto, Kuniaki Konishi, Makoto Kuwata-Gonokami, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We propose a tunable metamaterial actuated by pneumatic force. The unit of the proposed metamaterial has a pair of sprit-ring-resonators (SRR), and the gap between them is controllable around sub-micron-order in size. One SRR is formed on a thin cantilever, which can be bent due to differential pressure between the upper and lower surfaces of the cantilever, whereas the other is fixed on a thin membrane. We confirmed that controlling the gap ranging from sub-micron-order to a few-micron-order was suitable for tuning a resonant frequency of a terahertz metamaterial.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1221-1224
Number of pages4
ISBN (Print)9781479935086
DOIs
Publication statusPublished - 2014 Jan 1
Externally publishedYes
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 2014 Jan 262014 Jan 30

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Isozaki, A., Kan, T., Takahashi, H., Kanda, N., Nemoto, N., Konishi, K., Kuwata-Gonokami, M., Matsumoto, K., & Shimoyama, I. (2014). Tunable metamaterials by controlling sub-micron gap for the THz range. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 1221-1224). [6765868] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765868