Two-axis MEMS-based force sensor for measuring the interaction forces during the sliding of a droplet on a micropillar array

Nguyen Thanh-Vinh, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Abstract In this paper, we proposed a 2-axis MEMS-based force sensor to directly measure the interaction forces during the sliding of a water droplet on a superhydrophobic surface with a micropillar array. In our sensor design, a 300-nm-thick silicon (Si) structure was fabricated beneath a single micrometer-sized pillar as the sensing element. Two piezoresistors were formed at the root of two opposite Si beams to detect the forces acting on the pillar surface in the normal and shear directions. The proposed sensor has a sensing resolution of less than 20 nN for both normal and shear forces. This resolution is confirmed to be sufficient to measure the forces of a droplet acting on a micropillar. The fabricated sensor was demonstrated to be able to measure the interaction forces during the sliding of a 7.5 μL water droplet on the micropillar array.

Original languageEnglish
Article number8900
Pages (from-to)35-43
Number of pages9
JournalSensors and Actuators, A: Physical
Volume231
DOIs
Publication statusPublished - 2015 Aug 11
Externally publishedYes

Fingerprint

microelectromechanical systems
MEMS
sliding
sensors
Sensors
Silicon
interactions
Water
shear
silicon
water
micrometers

Keywords

  • Droplet
  • Force sensor
  • MEMS
  • Micropillar array
  • Sliding
  • Superhydrophobic

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Two-axis MEMS-based force sensor for measuring the interaction forces during the sliding of a droplet on a micropillar array. / Thanh-Vinh, Nguyen; Takahashi, Hidetoshi; Matsumoto, Kiyoshi; Shimoyama, Isao.

In: Sensors and Actuators, A: Physical, Vol. 231, 8900, 11.08.2015, p. 35-43.

Research output: Contribution to journalArticle

@article{9e87b6eb5a3e4c1aac111552712d105d,
title = "Two-axis MEMS-based force sensor for measuring the interaction forces during the sliding of a droplet on a micropillar array",
abstract = "Abstract In this paper, we proposed a 2-axis MEMS-based force sensor to directly measure the interaction forces during the sliding of a water droplet on a superhydrophobic surface with a micropillar array. In our sensor design, a 300-nm-thick silicon (Si) structure was fabricated beneath a single micrometer-sized pillar as the sensing element. Two piezoresistors were formed at the root of two opposite Si beams to detect the forces acting on the pillar surface in the normal and shear directions. The proposed sensor has a sensing resolution of less than 20 nN for both normal and shear forces. This resolution is confirmed to be sufficient to measure the forces of a droplet acting on a micropillar. The fabricated sensor was demonstrated to be able to measure the interaction forces during the sliding of a 7.5 μL water droplet on the micropillar array.",
keywords = "Droplet, Force sensor, MEMS, Micropillar array, Sliding, Superhydrophobic",
author = "Nguyen Thanh-Vinh and Hidetoshi Takahashi and Kiyoshi Matsumoto and Isao Shimoyama",
year = "2015",
month = "8",
day = "11",
doi = "10.1016/j.sna.2014.09.015",
language = "English",
volume = "231",
pages = "35--43",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

TY - JOUR

T1 - Two-axis MEMS-based force sensor for measuring the interaction forces during the sliding of a droplet on a micropillar array

AU - Thanh-Vinh, Nguyen

AU - Takahashi, Hidetoshi

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2015/8/11

Y1 - 2015/8/11

N2 - Abstract In this paper, we proposed a 2-axis MEMS-based force sensor to directly measure the interaction forces during the sliding of a water droplet on a superhydrophobic surface with a micropillar array. In our sensor design, a 300-nm-thick silicon (Si) structure was fabricated beneath a single micrometer-sized pillar as the sensing element. Two piezoresistors were formed at the root of two opposite Si beams to detect the forces acting on the pillar surface in the normal and shear directions. The proposed sensor has a sensing resolution of less than 20 nN for both normal and shear forces. This resolution is confirmed to be sufficient to measure the forces of a droplet acting on a micropillar. The fabricated sensor was demonstrated to be able to measure the interaction forces during the sliding of a 7.5 μL water droplet on the micropillar array.

AB - Abstract In this paper, we proposed a 2-axis MEMS-based force sensor to directly measure the interaction forces during the sliding of a water droplet on a superhydrophobic surface with a micropillar array. In our sensor design, a 300-nm-thick silicon (Si) structure was fabricated beneath a single micrometer-sized pillar as the sensing element. Two piezoresistors were formed at the root of two opposite Si beams to detect the forces acting on the pillar surface in the normal and shear directions. The proposed sensor has a sensing resolution of less than 20 nN for both normal and shear forces. This resolution is confirmed to be sufficient to measure the forces of a droplet acting on a micropillar. The fabricated sensor was demonstrated to be able to measure the interaction forces during the sliding of a 7.5 μL water droplet on the micropillar array.

KW - Droplet

KW - Force sensor

KW - MEMS

KW - Micropillar array

KW - Sliding

KW - Superhydrophobic

UR - http://www.scopus.com/inward/record.url?scp=84938976557&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84938976557&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2014.09.015

DO - 10.1016/j.sna.2014.09.015

M3 - Article

VL - 231

SP - 35

EP - 43

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

M1 - 8900

ER -