Two-axis MEMS-based force sensor for measuring the interaction forces during the sliding of a droplet on a micropillar array

Nguyen Thanh-Vinh, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticle

16 Citations (Scopus)


Abstract In this paper, we proposed a 2-axis MEMS-based force sensor to directly measure the interaction forces during the sliding of a water droplet on a superhydrophobic surface with a micropillar array. In our sensor design, a 300-nm-thick silicon (Si) structure was fabricated beneath a single micrometer-sized pillar as the sensing element. Two piezoresistors were formed at the root of two opposite Si beams to detect the forces acting on the pillar surface in the normal and shear directions. The proposed sensor has a sensing resolution of less than 20 nN for both normal and shear forces. This resolution is confirmed to be sufficient to measure the forces of a droplet acting on a micropillar. The fabricated sensor was demonstrated to be able to measure the interaction forces during the sliding of a 7.5 μL water droplet on the micropillar array.

Original languageEnglish
Article number8900
Pages (from-to)35-43
Number of pages9
JournalSensors and Actuators, A: Physical
Publication statusPublished - 2015 Aug 11
Externally publishedYes



  • Droplet
  • Force sensor
  • MEMS
  • Micropillar array
  • Sliding
  • Superhydrophobic

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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